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EBARA ESA25-D Instruction Manual page 52

Multi-stage dry vacuum pump

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P.34
MP:##.# A
▽ △
ALARM:CASING
TEMP.HIGH
▽ △
CONTROL:LOCAL
MODE:NORMAL
▽ △
ALARM/WARNING
HISTORY?
UNIT NO.
******
▽ △
PUMP TYPE 200V
&&&&&&&&
▽ △
OPE.TIME
#### h
▽ △
BACK PRESSURE
##.# kPa
▽ △
PUMP N2 FLOW
##.# Pam3/s
▽ △
WATER FLOW
##.# L/min
▽ △
PUMPCASING
### ℃
PM10U
Motor current
ALARM/WARNING
1
Displayed on top of the menu when ALARM/WARNING happened.
Number of ALARM/WARNING shown on the upper right of the screen.
Control mode: LOCAL, REMOTE, COM
Pump operational mode: NORMAL(rated), S. ENERGY (energy-saving)
ALARM:CASING
ENTER
TEMP.HIGH
Alarm history
▽ △
(Indication of history)
WARNING:BP MOTOR
TEMP.HIGH
Pump unit No.
Pump type
Total operation time
Back pressure (option)
Pump N2 gas flow
Cooling water flow
Pump casing temperature
Fig. 6.2 Key operation
for the pump operation status display
ENTER
Displayed during ENTRY key pushed
ENTER
Displayed during ENTRY key pushed
How to read the alarm history
Alarm 1st code
History No.
(The lower number. is newer.)
002 51
020901 12 : 25 : 26
Occurrence date
See Table 6.2 for the alarm codes.
001 06
00 ####
020901 12:23:21
002 51
00 ####
020901 12:25:26
Alarm 2nd code
Analog value
00 ####
EBARA
CORPORATION

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