Related Manuals for EBARA EV-A Series
Summary of Contents for EBARA EV-A Series
- Page 1 EV-A Series DRY VACUUM PUMP APPLICABLE TYPE EV-A06 INSTRUCTION MANUAL EBARA CORPORATION PM10U...
- Page 3 HANDLING OF MANUAL This instruction manual describes installation, operation, and maintenance about the EV-A Series Dry Vacuum Pump. Be sure to read this instruction manual to operate correctly before installing and operating it. In particular, take care about the precautions for safety to the following warning words.
- Page 4 When you pump flammable chemical, including solvent stated above, always introduce N2 through gas ballast system. *To vacuum solvent and condensable gas, read P.17 3.3 Gas Ballast Mechanism and P.39 6.3 About The Gas Ballast Mechanism beforehand to handle correctly. EBARA CORPORATION PM10U...
- Page 5 18months from shipment by EBARA, whichever comes first, shall be repaired or replaced free of charge. This warranty shall be applicable only to the case where the equipment has been correctly operated in accordance with this instruction manual and other instructions.
- Page 6 * Using this vacuum pump to the process where existing radiation is prohibited. DANGER Don’t use it to exhaust the combustible gas or the dangerous fumes for the human body, etc. EBARA CORPORATION PM10U...
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Page 7: Table Of Contents
Removal of the Pump -------------- 43 TROUBLESHOOTING Primary Trouble -------------- 44 Pump Malfunction -------------- 45 SCRAPPING METHOD -------------- 46 PRECAUTIONS ON RETURN OF PRODUCT 10.1 Note -------------- 46 10.2 Returning Procedure -------------- 46 < Notice > Return Notice Sheet EBARA CORPORATION PM10U... -
Page 8: Items Related To Safety
Pump remains hot during/after operation. Avoid direct skin contact otherwise it may cause burn. Keep combustible materials away from the product. Do not attempt to service the product when it is hot. Do not remove packaging covers during operation. EBARA CORPORATION PM10U... - Page 9 Use lubricant oil specified on P.18 (3.4. Product specification) section. Do not overfill more than upper limit as it may damage the product. Refill oil immediately when oil level is low as it may cause severe damages to the product. EBARA CORPORATION PM10U...
- Page 10 Pump stops if the controller is removed during operation. Frequent power supply to the inverter may shorten the inverter life. Remote operation described in 6.2.3 section P.37 is recommended if frequent RUN/STOP is necessary. EBARA CORPORATION PM10U...
- Page 11 For safety reasons, replace remaining gases with N2 (nitrogen) completely and seal inlet and outlet port with blank off caps prior to returning the pump for repair/overhaul service if the pump was used to pump toxic gases. EBARA CORPORATION PM10U...
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Page 12: Types Of Warning Label
The warning label positions are shown on the next page. List of Warning Labels on the Dry Vacuum Pump Warning Label A Warning Label B Warning Label D WARNING Warning Label C Hot surface. Can burn hands. Do not touch. 警 告 高温の為、火傷の恐れあり。 触れないでください。 EBARA CORPORATION PM10U... -
Page 13: Warning Label Positions
P.13 1.3 Warning Label Positions Warning Label B Warning Label A Warning Label C Warning Label D Warning Label B Warning Label A Warning Label C Warning Label D 1Ph AC100-120V 50/60Hz EBARA CORPORATION PM10U... -
Page 14: Product Confirmation
* Don’t pile packed pumps and don’t lay each pump on its side in any case CONFIRMATION Don’t pile packed pumps and don’t lay each pump on its side in any case, otherwise the damage may be caused to the pumps. EBARA CORPORATION PM10U... -
Page 15: Product Overview
(Maximum water vapor pump rate : 350g/h) It is recommended to use the following gas ballast mechanism when pumping condensable gases. ⇒Pumping non flammable vapor, condensable solvent : Atmospheric (air) ballast ⇒Pumping flammable solvent and gas, condensable solvent : N2 ballast EBARA CORPORATION PM10U... -
Page 16: Product Specifications
Pollution Degree 2 Maximum Operating Altitude 2000m Utility Requirements Voltage [50/60 Hz] 100-120 V 200-240 V 200-240 V Power Tolerable voltage Note6） ±10％ Supply ±10％(Max 250V) fluctuation Note5） Capacity 1.5 kVA NRTL（UL61010-1） Note7） Safety standard CE Marking EBARA CORPORATION PM10U... - Page 17 Note 5) This describes tolerable voltage range, and is not steady voltage. Note 6) Do no use this product with over 250V even it is within the tolerable range. Note 7) For more details about oversea safety standard, contact one of our sales offices listed in the back. EBARA CORPORATION PM10U...
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Page 18: External View
P.18 3.5 External View EBARA CORPORATION PM10U... -
Page 19: Pumping Performance
P.19 3.6 Pumping Performance Gas ballast valve : ON Gas ballast valve : OFF 1.0E-01 1.0E+00 1.0E+01 1.0E+02 1.0E+03 1.0E+04 1.0E+05 Pressure[Pa] Note) The gas ballast mechanism is an option. EBARA CORPORATION PM10U... -
Page 20: Installation Of The Pump
Do not lift the pump by your self. Lift the pump by hand with two (2) persons. Do not use sling or the like to lift the pump as the handles are not designed to be used with slings. EBARA CORPORATION... - Page 21 A place where a toxic gas such as acid and alkali gases exists. c) A place where an explosive or combustible gas exists. d) A dusty place. * Do not install the pump in the environment where the pump may be exposed to rain, snow, ice and dust. EBARA CORPORATION PM10U...
- Page 22 *After installation of the pump, please remove eyebolts. Surface of the base Liner adjusting should be flat and level. *Please keep the removed eyebolts. （Please prepare Or attached firm frame. required Fig.4.2 How to Fix the pump EBARA CORPORATION PM10U...
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Page 23: Piping
* Take it into consideration to allow enough conductance for piping and exhaust gas processing facilities so that the pressure on the outlet port side (back pressure) of this pump may be 3 kPa or less. EBARA CORPORATION PM10U... -
Page 24: Electric Wiring
Connections of the dry pumps to a facility wiring system or host system must be in accordance with all applicable wiring practices described in the National Electric Code (for US Installations only) or all applicable facility wiring practices for the European Union (for EU installations only). EBARA CORPORATION PM10U... - Page 25 Be sure to perform grounding, otherwise an electric shock may be caused by electric leakage. Use the wiring materials that correspond to the pump power. Table 4.2 Wiring material Type EV-A06-1 EV-A06-2 EV-A06-3 Applicable wire size AWG#12 (3.5 mm AWG#14 (2.0 mm Number of wicks EBARA CORPORATION PM10U...
- Page 26 (Not connected) Grounding Fig.4.4 CN1 Pump-side Receptacle Table 4.6 CN1 Receptacle Specification Receptacle model NET-244RM Connector maker Nanaboshi Electric Mfg. Co., Ltd. Applicable plug NET-244PF (Note) Applicable wire size AWG #14 (2.0mm Note) Applicable plug is standard accessory EBARA CORPORATION PM10U...
- Page 27 I/O connector CN2 D-sub Connector Pin connections CONFIRMATION For Input signals (Pin No. 1-9, 2-10, 3-11, 4-12), apply a voltage of 24V DC on the pump controller side. Don't apply a voltage on the equipment side; otherwise the controller may go wrong. EBARA CORPORATION PM10U...
- Page 28 Please make the RESET Input signal (pin No. 2-10) "Closed" for 0.1 seconds or more. When I/O connector (CN2) is used for remote control and monitoring, use shielded cable to eliminate EMC noise. Connect shield end to connector housing. EBARA CORPORATION PM10U...
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Page 29: Operation Panel
(9) RUN Switch (2)ALARM Lamp (11) ESC Switch (5)Monitor Lamp(Hz) (3)PROGRAM Lamp (6) Monitor Lamp(A) (10) STOP/RESET Switch (12) UP Switch (13) DOWN Switch (14) SET Switch Fig. 5.1 Operation panel Power connector Fig. 5.2 Pump operation side EBARA CORPORATION PM10U... - Page 30 Starts up the pump (Only in local mode) (10) STOP/REST Switch Stops the pump, and reset (11) ESC Switch Switches between LED indicator and group code (12) Up Switch Operates data indicator (13) Down Switch (14) SET Switch Switches between indicated data and content EBARA CORPORATION PM10U...
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Page 31: How To Switch Led Display
Error count monitor Time *5 1000 - 6553 Indicated by 10 time Last 6 errors available. d081 – d086 Error monitor See P.47 how to use LED monitor section - indicated when there is no error EBARA CORPORATION PM10U... - Page 32 3333. 3,333 hour Total run hour 1000 – 9999 3333 33,330 hour Total electrified hour 「333 *3 「100 - 「999 333,000 hour 0. – 9999. 3333. 3,333 time Error count monitor 1000 - 6553 3333 33,330 time EBARA CORPORATION PM10U...
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Page 33: Operation And Stop
(The RUN Lamp on the operation panel will come on.) Driving connector 3) Make sure that abnormality (unusual noise and/or vibration) is not found after the pump starts. STOP/RESET Switch STOP 1) When the power supply is turned off, the pump will be stopped. EBARA CORPORATION PM10U... - Page 34 Make sure that abnormality (unusual noise and/or vibration) is not found after the pump starts. STOP Press the STOP/RESET switch on the operation panel, the pump will be stopped. (The RUN Lamp on the operation panel will go out.) EBARA CORPORATION PM10U...
- Page 35 No. 1-9) then apply the command again or press STOP/RESET button. In the states that “LOCAL/REMOTE Selection Switch” in the I/O connector (CN2) is open – means Pin No.3-11 is open circuit –, external signal mode is not available. In this case, handling by operation-panel is required. EBARA CORPORATION PM10U...
- Page 36 1) Press the RUN/STOP switch on the handheld controller. The pump operation will stop and the RUN Lamp on the handheld controller will go out. CONFIRMATION Do not detach the handheld controller during the operation. The pump stops when the handheld controller is removed. EBARA CORPORATION PM10U...
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Page 37: About The Gas Ballast Mechanism
When pump is used in dusty environment the filter may get clogged and reduce ballast gas flow into the pump which will cause a failure to prevent condensation in the pump. Install the pump in clean environment. EBARA CORPORATION PM10U... - Page 38 Gas ballast valve Photo 6.2 The pump of which gas ballast valve is installed 1/4 tube Fitting Valve Check valve Gas ballast valve Gas ballast valve ：Close ：Open Fig. 6.1 How to open-and-close the gas ballast valve EBARA CORPORATION PM10U...
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Page 39: Maintenance
Deactivate pump run command signal before servicing if pump error arises during the operation under remote control. When pump abnormal condition arises other than error message and/or alarm lamp on the controller, refer to P.46 (8. Trouble shooting) section for trouble shooting. EBARA CORPORATION PM10U... -
Page 40: Inlet And Outlet Plumbing
The level may be lower than lower limit during the operation which is normal. Stop the pump and wait until the level becomes stable, then check the level. Inlet NW40 Outlet NW25 Cooling air outlet Oil level gauge Upper limit Fig. 7.1 Oil level gauge position lower limit Photo 7.1 Oil level EBARA CORPORATION PM10U... - Page 41 Refill lubricant oil immediately when oil level is low as it may cause severe damages to the product. Repair service may be necessary if the product requires frequent oil refill. Contact one of the office listed in the back of this manual. EBARA CORPORATION PM10U...
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Page 42: Overhaul
(1) Operate the pump within the range described in the catalog and the instruction manual. (2) Perform maintenance as specified on P.41 (7. Maintenance) section. (3) Product inspection and overhaul service are available at EBARA service factory or one of the authorized service representative (4) When returning the pump, please attach Return Notice Sheet with the pump. -
Page 43: Removal Of The Pump
2) Stop supplying power and disconnect the power connector. 3) Remove the suction pipe and the outlet pipe, and seal the inlet port and the outlet port with blank flange. 4) Packing 5) Use eyebolts(M8) and lift up the pump when load/unload the pump. (P.22) EBARA CORPORATION PM10U... -
Page 44: Troubleshooting
Motor replacement or overhaul is needed. Incompleteness of power supply or wiring Repair the power supply and wiring. ※Please contact the business office/branch at the end of the book when the troubles other than listed above occur. EBARA CORPORATION PM10U... -
Page 45: Pump Malfunction
Number of rotation is decreasing Note 1） :Abnormality will not be reset for 10 seconds after alarm occurred. LED Display How to use LED monitor UP Switch PROGRAM Lamp STOP/RESET Switch DOWN Switch Fig. 8.1 Pump operation side EBARA CORPORATION PM10U... -
Page 46: Scrapping Method
10) Hand over a copy of the Return Notice Sheet to the forwarding agent. If the product to be returned is polluted, be sure to inform the forwarding agent of this effect. 11) Put the original of the Return Notice Sheet into an envelope and stick it on the outside of the product to be returned. EBARA CORPORATION PM10U... -
Page 47: Return Notice Sheet
*Other ( ii) Contents of failure IV. Person in charge and where to contact Name : (signature) Post : Company name / plant name : Address : Telephone / FAX No. : TEL Date of return : EBARA CORPORATION PM10U... - Page 48 LIVINGSTONE, WEST LOTHIAN, EH54 9DE, U.K. PHONE:44-1506-460232 URL: FAX:44-1506-460222 http://www.ebara.com.sg/index.php?option=com_frontpage&Itemid=1 CHINA Service Locations: http://www.ebara-pm.eu/about-us/locations.html SHANGHAI EBARA PRECISION MACHINERY CO., LTD. KOREA ZHANGJIANG HIGH-TECHNIC PARK, NO.76 LANE 887, EBARA PRECISION MACHINERY KOREA INC. ZUCHONGZHI ROAD, SHANGHAI, 201203, CHINA PHONE:86-21-5131-7008 HEADQUARTERS FAX:86-21-5131-7048 20FL, KANGNAM BLDG.