EBARA ESA25-D Instruction Manual page 89

Display
ALARM:
WATER LEAKAGE
ALARM:
BACK PRESS. HIGH
ALARM:
EMERGENCY STOP
WARN: BACK
PRESS. HIGH
WARN: BACK
PRESS
WIRE BROKE
After you have taken the remedial actions above, reset the pump. If the problem that has
caused the ALARM signal still remains, the ALARM display will appear again even after you
have reset.
During REMOTE operation carry out the above procedures after you have turned off the
external start signal. When the external start signal remains on in the ALTERNATE mode,
the pump will start immediately when the RESET signal is applied.
PM10U
Symptom
Water leakage
Exhaust pressure
rises.
Emergency Stop
switch
Disconnection of
##.# back pressure
sensor
Back press sensor
is broken
Check Item
Tube fittings are loosened.
Instrument failure
Exhaust valve is closed.
Exhaust pipe is clogged with
by products.
Stop by emergency Stop
button.
Connector of back pressure
sensor is not connected.
Back pressure sensor failure
Instrument failure
P.71
Corrective Action
Re-tighten.
Replace instrument.
Check exhaust pipe.
Check exhaust pipe.
Check that pump can be
operated and turn the
button head to release
lock.
Connect back pressure
sensor connector.
Replace back pressure
sensor.
Replace instrument.
EBARA
CORPORATION