Table of Contents
Advertisement
EBARA Multi-Stage Dry Vacuum Pumps
2.2kW
11.2
60Hz
18.4
3.7kW
When the motor current goes above the rated value, or if the current is more than 10%
above the value that was recorded at the start-up operation, it is possible that by-
products are building up inside on one or all of the following: the pump casing, the gas
coolers (if equipped), or the connecting pipe. It is also possible that the foreign
substances have entered the pump. (For initial values, See "Start-Up & Trial Run".)
The pump can run continuously until it reaches the rated current, even if the motor
current is rising. Rising current usually indicates that the coolers (if equipped) or the
exhaust line are becoming blocked and need to be cleaned.
5.7
Nitrogen Purge Flow
Check the purge meter and confirm that the flow is within ±10% of the specified
value.(See "50x20 Specifications".)
NOTICE
!
The nitrogen purge rate has been adjusted at the factory to the required level, do
not adjust the needle valves located at the purge ports.
5.7.1
Nitrogen Supply Requirements
(See "50x20 Specifications".)
If the nitrogen purge rate is out of spec., check the following:
• The secondary pressure regulator. This may not be adjusted to the setting
value: 1 kgf/cm
• The nitrogen flow meter valve. This must be fully open.
• Inlet tubing connections for the nitrogen purge are not securely tightened.
5.8
Cooling Water Flow Rate
Check the cooling water flow rate.
Flow meter location: The forward meter is for the pump and motor; the rear meter is for
the gas coolers (if applicable). (See "80x25, Gear End".)
If the flow rate is less than the spec., check the following:
1. Check the water valve(s) for adequate opening.
2. Check the inlet pressure; it may be low. Maximum and required differential
pressure between inlet and outlet is 1.0-2.0 kgf/cm2 (14 - 28 psi).
3. Cooling water piping may be clogged.
4. Check for water leaks.
5. Check the flow meter screen for obstruction.
5.8.1
Cooling Water Requirements
930601-P
11.2
11.0 11.0 11.0 10.8 11.0 5.6
17.9
17.7 17.6 17.4 17.4 17.4 9.2
2
.
Pump Maintenance
5.6
5.5
5.5
5.4
9.0
8.9
8.8
8.7
5.4
5.5
8.7
8.7
27
Hide quick links:
Advertisement
Table of Contents
