EBARA ESA25-D Instruction Manual page 42

P.24
Fig. 4.6 25 Pin D Sub-Miniature Female Receptacle
Pin No. Signal name
1 RESET (+)
2 RESERVED (+)
3 RESERVED (+)
4 RESERVED (+)
5 RESERVED (+)
6 EMO STATUS (+)
7 PUMP N
8 RESERVED (+)
9 RESERVED (+)
10 BACK PRESSURE WARNING STATUS (+)*
11 RESERVED (+)
12 RESERVED (+)
13 −
14 RESET (−)
15 RESERVED (−)
16 RESERVED (−)
17 RESERVED (−)
18 RESERVED (−)
19 EMO STATUS (−)
20 PUMP N
21 RESERVED (−)
22 RESERVED (−)
23 BACK PRESSURE ALARM STATUS (−)
24 RESERVED (−)
25 RESERVED (−)
* : As optional
** : It can change to "Abnormality ： OPEN, Alternate " by DIP SW. setting.
PM10U
13
25
(As seen from connecting side)
Table 4.6 Control Connector Pin Assignment(CN-Y)
WARNING STATUS (+)
2
WARNING STATUS (−)
2
Screw lock size : M2.6
1
14
Contact pin surface : Au
I/O Signal type
IN RESET:CLOSE
IN
IN
IN
IN
OUT
Abnormality : OPEN,Alternate
OUT
Abnormality : CLOSE,Alternate**
OUT
OUT
OUT
Abnormality : CLOSE,Alternate**
OUT
OUT
EBARA
CORPORATION