EBARA ESA25-D Instruction Manual page 17

4.2 Piping...................................................................................................... 16
4.2.1 Vacuum and Exhaust Piping ........................................................... 16
4.2.2 Cooling Water Piping....................................................................... 17
4.2.3 N2 Gas Piping ................................................................................. 18
4.2.4 Ventilation Duct ............................................................................... 19
4.3 Electrical Wiring...................................................................................... 20
4.3.1 Grounding........................................................................................ 20
4.3.2 Power Supply Wiring ....................................................................... 21
4.3.3 Control Signal Wiring....................................................................... 22
4.3.4 Additional Emergency Off (EMO) input ........................................... 27
4.4 Voltage Change...................................................................................... 28
4.4.1 Method of changing transformer terminal wiring.............................. 28
4.4.2 Change of DIP switch ...................................................................... 28
4.4.3 Method of changing wiring in motor terminal box ............................ 29
4.4.4 Method of exchanging the main fuses ............................................. 29
5. Power Supply for accessories....................................................................... 30
6. LCD Controller .............................................................................................. 31
6.1 LCD Outline ............................................................................................ 31
6.2 LCD Indication ........................................................................................ 32
6.3 Setting the operational mode.................................................................. 36
6.3.1 Setting the pump operation control mode........................................ 38
6.3.2 Setting the DIP switch ..................................................................... 39
6.3.3 Setting the WARNING value for N2 flow rate .................................. 40
6.4 Dip Switch............................................................................................... 41
6.5 DIP Switch setting display ...................................................................... 44
6.6 Starting/stopping the pump with the LCD controller................................ 46
7. Operation ...................................................................................................... 47
7.1 Before Starting........................................................................................ 47
7.2 START/STOP ......................................................................................... 49
7.2.1 LOCAL (Pump Side) Start/Stop....................................................... 50
7.2.2 REMOTE Start/Stop ........................................................................ 51
7.2.3 COMMUNICATION Start/Stop ........................................................ 51
8. Maintenance and Inspection ......................................................................... 52
8.1 Internal energies..................................................................................... 52
8.1.1 Power source .................................................................................. 52
8.1.2 Cooling water .................................................................................. 52
8.1.3 Nitrogen gas .................................................................................... 52
8.2 Routine Inspection.................................................................................. 53
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