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Routine Inspection - EBARA ESA25-D Instruction Manual

Multi-stage dry vacuum pump

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8.2 Routine Inspection

Check periodically that ALARM signal is not output on the LCD controller or
remote output.
No.
Motor Current
2
N
Gas Flow
2
3
Vibration / Noise
4
Lubrication oil Quantity
5
Cooling water flow
6
Pump casing Temp.
7
Color of lubricant oil
When the WARNING/ALARM display appears, take action in accordance with
Section 10. "Troubleshooting."
If the lubrication oil amount is lower than the lower limit line of the oil level gauge,
supply the lubrication oil. See the section 8.3 "Lubrication oil" when adding the
oil.
WARNING
WARNING
Even when the cause of the WARNING/ALARM signal has been removed the
signal will be maintained until the RESET signal is entered. After you have taken
the remedial action, press the RESET button on the controller or enter the
RESET signal from the control signal connector to reset the WARNING.
PM10U
Table 8.1 Typical check items
Item
Oil Level switch and level gauge
Switch off the power supply to the pump first and lockout
before you start on maintenance.
The pump and exhaust piping will remain at a high
temperature during operation and for a short time after the
pump has stopped.
Be sure to avoid contact and keep inflammable substances out
of reach.
Do not remove the outer cover during operation.
Sensor
Current Transformer
Flow sensor
-----
Flow sensor
Thermo- Couple
-----
P.53
Interval
(recommended)
Every 1 week
Every 1 month
EBARA
CORPORATION

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