EBARA ESA25-D Instruction Manual page 44

P.26
CAUTION Do not wire vacant pins.
CAUTION Apply a 12V DC power for input signals on the pump side. Do
CAUTION
CAUTION When output signals are used to energize an inductive load
PM10U
not apply this voltage on the equipment side.
The output signals are generated from an open collector
output.
Please use it by the equipment side, impressing the power
supply of DC4V to DC27V.
Be sure to wire all signals with the correct polarity
(SIG./COM.)
such as a relay, be sure to insert a diode (100V. 1A class) in
order to absorb the back electromotive force due to surge
currents.
EBARA
CORPORATION