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EBARA ESA25-D Instruction Manual page 85

Multi-stage dry vacuum pump

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WARN: WATER
FLOW LOW
WARN: PUMP N2
FLOW LOW
WARN: MP CASING
TEMP HIGH
WARN: MP
OIL LEVEL LOW
WARN: BACK
PRESS HIGH
WARN: BACK PRES
WIRE BROKE
WARN:
MP CURRENT HIGH
WARN:
## COMM.ERROR
WARN: PUMP BOX
TEMP HIGH
WARN:PUMP N2
VALVE ERROR
After you have taken the remedial actions above, reset the pump. If the problem
that has caused the WARNING signal still remains, the WARNING display will
appear again even after you have reset.
PM10U
Symptom
Water flow is reduced.
Coupler is disconnected.
Pressure is not sufficient.
Root valve is closed.
Water pipe is clogged.
Tube fittings are loosened.
Instrument failure
Outlet & inlet pipes are
reverse. (flow value 0 L/min)
Pump N
flow is
N
2
reduced.
Primary pressure is
insufficient.
Regulator setting value
LOW.
N
Leaks on N
Instrument failure
Casing temperature
Duct ventilation insufficient
rises.
Pump back pressure rises.
Increase of the gas load.
Accumulation of by-product
Cooling water flow is
reduced.
Oil level is low.
Check oil level.
(See Fig.8.1,8.2)
Exhaust pressure
Exhaust valve is closed.
rises.
Instrument failure
Wire of back pressure
Instrument failure
sensor is broken.
MP motor current
Back press. rises.
rises.
Increase of the gas load.
Rotor makes contact.
(Accumulation of
by-products)
(Substance plunge)
Open phase
Communication is not
Connection error of the
established.
instrumented units
Instrument failure
Temp. rises in pump
Duct ventilation not
cover.
sufficient
N2 valve open.
Setting is N2 0 mode.
Check Item
port is not connected.
2
pipe is clogged.
2
pipe.
2
P.67
Corrective Action
Connect coupler.
Apply sufficient pressure.
Open valve.
Clean or replace piping.
Re-tighten.
Replace instrument.
Connect pipes correctly.
Connect N
pipe fitting.
2
Apply sufficient pressure.
Increase pressure setting.
Replace N
piping.
2
Check the fittings.
Replace instrument.
Ventilate sufficiently.
Check exhaust pipe
Reduce the inflow gas
amount.
Replace or overhaul pump.
Increase cooling water flow.
Charge lubrication oil.
Check exhaust pipe.
Replace instrument.
Replace instrument.
Check exhaust pipe.
Reduce the gas flow rate.
Replace or overhaul pump.
Check wiring.
Check the connection of the
instrumented unit.
Replace instrument.
Ventilate sufficiently.
Close N2 valve.
(at the side of pump)
EBARA
CORPORATION

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