EBARA ESA25-D Instruction Manual page 83

Abnormal symptom
Open the fuse
Power LED does not come
on.
Nothing appears on LCD
MP does not start when
applying START button.
MP does not start when
entering external "MP start"
signal input.
Reverse rotation
Abnormal noise
Excessive vibration
Vacuum pressure increase.
**MEMORY ERROR** is
displayed on LCD
changing the dip switch
setting
**WATCH DOG TIMER
ERROR** is displayed on
LCD.
PM10U
Check Item
Incorrect wiring
Short circuit
Input wrong voltage
No power supply to pump.
Incorrect wiring
Input wrong voltage
Open the fuse
Disconnection of the LCD's connector
Instrument failure
"Remote" mode has been selected.
Start-up conditions are not satisfied.
("Startfail" is displayed.)
Instrument failure
"Local" mode has been selected.
Start-up conditions are not satisfied.
("Startfail" is displayed.)
Instrument failure
Incorrect wiring
Adjustment feet are not applied.
Some object is making contact with the
outer cover.
The fastening screws of the outer corer
have worked themselves loose.
Parts of the pump are damaged.
Accumulation of by-products in pipes.
N pressure setting is high.
2
Leak from vacuum piping.
Accumulation of by-products in pumps.
None
None
Corrective Action
Check wiring.
Replace or overhaul pump.
Check power supply voltage.
Check power supply.
Check wiring.
Check power supply voltage.
Check FUSE and wiring
Connect LCD's connector
Replace instruments.
Set switch to "Local" mode.
Satisfy all start-up conditions.
Replace instrument.
Set switch to "Remote".
Satisfy all start-up conditions.
Replace instrument.
Check wiring.
Use the adjustment feet.
Remove the object.
Tighten the fastening screws.
Replace or overhaul pump.
Clean piping.
Set pressure for correct value.
Check piping.
Replace or overhaul pump.
Need "Countermeasure against
electric Noise" to pump.
Need "Countermeasure against
electric Noise" to pump.
EBARA
CORPORATION
P.65