Local (Pump Side) Start/Stop - EBARA ESA25-D Instruction Manual

P.50
CAUTION Process gases will remain in the vacuum pipes and the pump
[ NOTE ] It will take approx. 30 min. to reach the prescribed ultimate pressure when
pump starts under the state of cold start.
[ NOTE ] Do not exhaust the process gases until at least 30 minutes after the
pump has been started. The pump casing temperature will stabilize
after about 4 hours and it is recommended not to start exhausting the
process gases earlier than this.
When DIP switch-A No. 4 is placed into the ON position and the toggle switch is
changed from the LOCAL to the REMOTE setting the pump will stop regardless
of the external signal input.

7.2.1 LOCAL (Pump Side) Start/Stop

a) START
Press the START button on the controller.
The Main Pump (MP) will start and the M.P. RUN lamp on the controller will
light.
The current is indicated on the display during pump operation.
For other status display indications, refer to Table 6.1.
[ NOTE ]
generated. When the START button is pressed, "STARTFAIL" will
appear on the display.
b) STOP
Press the STOP button on the controller. The pump will stop.
The RUN lamp goes out and the display gives a power reading of 0.0A.
PM10U
even after the pump has been stopped.
Be sure that therefore to purge for at least 1 hour after the
pumps has been stopped.
Do not discontinue the N
for a short time.
The pump will not start when an WARNING/ALARM has been
purge when the pump is stopped only
2
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