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EBARA ESA25-D Instruction Manual page 87

Multi-stage dry vacuum pump

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ALARM: MP
CASING TEMP
HIGH
ALARM:MP MOTOR
TEMP H.HIGH
ALARM:
MP NO CURRENT
ALARM:
BACK PRESS HIGH
ALARM:
EMERGENCY OFF
ALARM:
IO COMM.ERROR
ALARM:STARTFAIL
ALARM/WARN EXIST
ALARM:
EXT. INTERLOCK
After you have taken the remedial actions above, reset the pump. If the problem
that has caused the ALARM signal still remains, the ALARM display will appear
again even after you have reset.
During REMOTE operation carry out the above procedures after you have
turned off the external start signal.
When the external start signal remains on in the ALTERNATE mode, the pump
will start immediately when the RESET signal is applied.
PM10U
Symptom
Pump casing temp.
Insufficient ventilation
rises.
Pump back press. rises.
Increase of the gas load.
Cooling water flow is
reduced.
Accumulation of
by-products
Main Pump (MP)
Cooling water flow is
motor coil temp.
reduced.
rises.
Motor failure
Open phase
No current.
Incorrect wiring
Open phase
Exhaust pressure
Exhaust valve is closed.
rises.
Instrument failure
Input the emergency
Stop by emergency Stop
stop switch.
switch.
Communication is not
Connection error of the
established.
instrumented units
Instrument failure
Start fault
Starting during
WARNING/ALARM status
Instrument failure
Interlocked
External interlock is
effective.
Check Item
Ventilate sufficiently
Check exhaust pipe &
silencer.
Reduce the inflow gas
amount.
Cool pump thoroughly
and reset.
Replace or overhaul
pump.
Cool pump thoroughly
and reset.
Replace or overhaul
pump.
Check wiring.
Check wiring.
Check wiring.
Check exhaust pipe.
Replace instrument.
Check that pump can be
operated and turn the
button head to release
lock.
Check the connection of
the instrumented unit.
Replace instrument.
Make sure that all
starting conditions are
met.
Replace instrument.
Check the external
interlock signal.
EBARA
P.69
Corrective Action
CORPORATION

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