EBARA ESA25-D Instruction Manual page 30

P.12
Power
Fuse
N Gas
2
Regulator
Water
Cooling Water Flow Sensor
PM10U
LCD Controller
Control
Connector
Noise
Control Circuit
Filter
Motor Starter
Fuse
Pressure Gauge
P
N Gas Flow Sensor
2
FT1
FT2
Back Pressure Sensor
Fig. 3.1 System Flow
Gas Inlet
Main Pump
(MP)
PS1
Gas Outlet
Motor
EBARA
CORPORATION
Check
Valve