EBARA ESA25-D Instruction Manual page 66

P.48
Operate the N
DIP switch-A No. 7.
If DIP Switch is set to OFF
If DIP Switch is set to ON
[ NOTE ] For normal operation, open the N
set close the valve when the production process does not lead to the
formation of reaction by-products in the pump or when the process
uses non-corrosive gases.
[ NOTE ] The N
when viewing facing the pump front panel (operating panel).
[ NOTE ] It takes 10 odd seconds until the flow has stabilized after you have
operated the N
(3) Turn on the power supply to the pump.
(4) Check on the WATER FLOW display of the LCD Controller that the cooling
water flow rate is 3.5L/min. or more.
(5) Re-check on the PUMP N
dilution N
the pressure gauge shows a reading of 0.04 - 0.07MPa.
After setting the pressure, press the red stopper to lock the knob in position.
In this condition, the shaft sealing N
(The shaft sealing N
displayed on the LCD controller.)
(6) When the WARNING/ALARM display appears on the LCD controller or
when any abnormal symptoms are found other than the display, take action
in accordance with 10. "Troubleshooting."
Even when the cause of the WARNING/ALARM display has been removed,
it is maintained until the RESET signal is entered. Either press the RESET
button or enter an external RESET signal from the control signal connector.
In the BUZZER Enabled mode using DIP switches, it is possible to stop the
buzzer by pressing the BZ.OFF button when the alarm is being generated.
(7) When the pump exhaust pipe is equipped with a valve, open this valve before
starting the pump.
CAUTION Problems will occur when the pump is operated with the valve
PM10U
gas selector valve in accordance with the dilution N
2
gas selector valve is positioned on the front panel at the right
2
gas selector valve.
2
FLOW display of the LCD Controller that the
2
gas flow rate is within the 17 - 20Pam3/s range. Also check that
2
flow rate is contained in pump N
2
closed as the exhaust pipe will be pressurized.
Open Valve.
Close Valve.
gas selector valve. To save N
2
flow rate is 3.0 – 4.5 Pam3/s.
2
2
mode set by
2
gas
2
flow rate currently
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