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EBARA ESA25-D Instruction Manual page 72

Multi-stage dry vacuum pump

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P.54
CAUTION The pump will not stop when an WARNING signal is generated.
CAUTION
If any abnormal symptoms other than those displayed on the LCD controller
appear, take action in accordance with the instruction of Section 10.
"Troubleshooting".
When the BZ.OFF button is pressed in the BUZZER Enable mode, the buzzer
will stop even during an warning status.
PM10U
When pump operation is continued in this condition a ALARM
signal will be generated or a serious breakdown will occur. Be
sure therefore to check the pump in accordance with the
instructions of Section 10. "Troubleshooting" after the process
plant has completed 1 cycle.
When a ALARM signal has been generated in the REMOTE
operating mode, do not start the maintenance tasks until you
have interrupted the external start signal. When the external
ALTERNATE start signal input is maintained, the pump will start
while the ALARM is being reset.
EBARA
CORPORATION

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