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EBARA ESA25-D Instruction Manual page 76

Multi-stage dry vacuum pump

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P.58
CAUTION Be sure to use the lubricant oils listed in specification table 3.1
CAUTION When the lubrication oil level exceeds the upper limit, the oil
CAUTION When the lubrication oil level is lower than the lower limit line,
PM10U
Fig. 8.3 Oil level gauge
only.
may leak to the pump side. Thus, be sure not to exceed the
upper limit line when adding the oil.
serious failure may be caused. If you find out the shortage,
add the oil immediately.
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EBARA
CORPORATION

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