EBARA ESA25-D Instruction Manual page 55

MP : ##.# A
SET
CONTROL MODE?
SET
DIP SW?
SET POINT
N2 WARNING?
PM10U
• Status display
• Setting the pump operation control mode
▲
▼
• Setting the DIP switch
▲
▼
• Setting the WARNING value for N2 flow rate
Fig. 6.3 How to set the operational mode
Pressing the key PRG. for 3 sec. or more
when the status screen is displayed switches
to the operational mode setting screen.
When the mode you want to
set is displayed, press the
ENTER to go to the setting
change screen.
P.37
EBARA
CORPORATION