Table Of Contents - EBARA ESA25-D Instruction Manual

xiv
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Environmental Basic Policies............................................................................... i
Safety Information............................................................................................... ii
Important Prior Warnings ....................................................................................iii
Safety Interlocks ................................................................................................. x
Standard Limited Warranty ................................................................................xii
Declaration of conformity ...................................................................................xii
CONNTENTS ...................................................................................................xiv
1. Foreword......................................................................................................... 1
2.Introduction ...................................................................................................... 1
2.1 Introduction............................................................................................... 1
2.2 Environmental Concerns .......................................................................... 2
3. Product Description ........................................................................................ 3
3.1 Outline ...................................................................................................... 3
3.1.1 Pump Module .................................................................................... 3
3.1.2 N2 Gas .............................................................................................. 3
3.1.3 Cooling Water.................................................................................... 4
3.1.4 Exhaust ............................................................................................. 4
3.2 Control System ......................................................................................... 4
3.2.1 Warning ............................................................................................. 4
3.2.2 Operation Status Control ................................................................... 5
3.3 The way of pump moving.......................................................................... 5
3.3.1 Preparation........................................................................................ 5
3.3.2 Moving method.................................................................................. 6
3.4 Release and shut off residual internal energy........................................... 7
3.4.1 Electrical Power - Lockout and Tagout .............................................. 7
3.4.2 Cooling water .................................................................................... 7
3.4.3 Nitrogen (N2)..................................................................................... 8
3.4.4 Returning to Service .......................................................................... 8
3.5 Detailed Specifications ............................................................................. 9
4. Installation..................................................................................................... 13
4.1 Movement and Fixation .......................................................................... 13
4.1.1 Location........................................................................................... 13
4.1.2 Caster and adjustment foot ............................................................. 13
4.1.3 Pump Fixation ................................................................................. 14
PM10U
CONNTENTS
EBARA
CORPORATION