Release And Shut Off Residual Internal Energy; Electrical Power - Lockout And Tagout; Cooling Water - EBARA ESA25-D Instruction Manual

3.4 Release and shut off residual internal energy

WARNING
WARNING
WARNING

3.4.1 Electrical Power - Lockout and Tagout

Lock the branch circuit in the OFF position and tag it out to perform maintenance
or troubleshooting. The operator should keep the key with himself while working.
Padlock with key and tagout label shall be prepared at user side. The
Lockout/Tagout procedures must comply with OSHA 29 CFR 1910.147 and
1910.331-335.
1. Verify that the LCD display is lit (confirming that pump is powered).
2. Turn the branch circuit disconnect off.
3. Insert padlock through holes on locking device. Close padlock and attach tag.
4. Verify that LCD display is unlit (confirming that pump is unpowered).
5. If unable to confirm interruption of power via LCD display, use a voltmeter
to probe contacts at Connector CN-C. Potential between any two pins
indicates that electrical power to the pump is not interrupted.

3.4.2 Cooling water

1. Close [facility] water supply to stop water supply to the pump, then close
water return valve. Follow [facility] procedures for locking these valves in
the off position.
2. Push the knurled outer ring of the quick-connect couplers toward the pump
to disconnect the water hoses. Carefully remove the male coupling halves
from the hoses and remake the quick-connects to drain the pump lines.
Have a catchment vessel and absorbent cloths at hand before removing the
couplings.
3. Make sure water outflow stops from both the facility lines and the pump.
PM10U
To avoid dangers potentially encountered during maintenance,
transportation or storage, follow instructions below to shut off
power.
Capacitors within the control panel retain residual energy after
interruption of power supply. Wait five (5) minutes after shutting
off breaker before opening the control panel. Carefully check that
bleed circuits have discharged the residual energy before servicing
the control panel.
To comply with SEMI S2, install lockable shutoff devices on
electrical, nitrogen and cooling water supplies. These devices
should be adjacent to and within sight of the pump.
P.7
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