EBARA ESA25-D Instruction Manual page 7

WARNING
WARNING Do not perform a withstand voltage test.
CAUTION Never operate the pump without pump cover for safety.
CAUTION This pump might break down if the voltage setting is not
PM10U
In designing the dry pumps, Ebara does not assume risks
caused by hazardous chemical reactions resulted from
simultaneous injection or mixture of multiple process gases in
the pumps, and the pump is not equipped with a protection
against the dangers from such pump usage.
suppliers and users must pay attention not to simultaneously
inject or mix those gases.
Failure to comply could result in damage to the sensitive
devices.
correctly changed. The default voltage setting is indicated on
the pump cover with label. Please indicate the new voltage
setting on the pump, when the voltage setting was changed.
v
（ ）
The tool
EBARA
CORPORATION