Power Supply Wiring - EBARA ESA25-D Instruction Manual

4.3.2 Power Supply Wiring

WARNING For compliance with SEMI S2, install an Approved lockout/tagout
CAUTION
CAUTION Be sure to connect the grounding wire.
CAUTION Wiring should be hard-wired or using twist-lock Hubbel type
Wire the connector for the main power supply. Fig. 4.4 and Tables 4.2 and 4.3
show the connector pin assignment.
Ｄ
Ｃ
Fig 4.4 Power Supply Receptacle
(As seen from out side,
just unplugged)
Pump model
Receptacle type
Recep. Manufacturer
Adapted plug type
Suitable wire
Power capacity kVA
PM10U
device on the branch circuit supplying the pump.
Use the correct wiring materials and size to match the
operating conditions in accordance with the power consumption
rating and ambient air temperature of the pump.
connector at power source side.
A
Ｂ
Table 4.3 Receptacle Specification
Japan Aviation Electronics Industry Co., Ltd.
Table 4.2 Pin Assignment
of Power Supply
Receptacle
No. Phase
A
B
C
D GND
Model ESA25-D
JL04HV-2E22-22PE-B
JL04V-6A22-22SE-EB
AWG #10
6.2
P.21
R
S
T
EBARA
CORPORATION