Operation; Before Starting - EBARA ESA25-D Instruction Manual

7. Operation

7.1 Before Starting

(1) Turn on the cooling water supply and check that there are no leaks at the
pipe connections.
CAUTION Without sufficient cooling water, the pump temperature will rise
[ NOTE ] The pump unit itself has no cooling water flow adjustment valve.
(2) Turn on the N
Check that the regulator attached to the pump is closed. (It is closed when
the pressure adjustment knob is fully turned in the counterclockwise
direction.) Open the main valve and check that there are no N
from the pipe connections.
Slowly turn the pressure adjustment knob clockwise to set the pressure
(gauge pressure) to 0.05 MPa first. Then press the red stopper to lock the
knob in position.
WARNING Be sure to purge with N
CAUTION Abrupt rotation of the pressure adjustment knob will cause the
CAUTION
PM10U
and problems such as rotor contact will occur.
gas supply.
2
reduce the formation/deposition of reaction by-products in the
pump. When inflammable and/or toxic gases are diluted with N
to the safe concentration, be sure to maintain a separate supply
of N gas to the pump exhaust pipe.
2
pressure indicator needle of the regulator to wobble and result
in an inaccurate pressure display.
Unless a sufficient supply of N
problems will occur such as oil back flow or pump corrosion and
accretion of reaction by-products.
gas in order to prevent corrosion and
2
gas is maintained, serious
2
P.47
gas leaks
2
2
EBARA
CORPORATION