Important Prior Warnings - EBARA ESA25-D Instruction Manual

DANGER
WARNING Be careful not to overturn the pump when pushing and pulling it
WARNING All electrical works must be performed by only a qualified
WARNING Turn power off and lockout before starting on wiring
WARNING Supply N
WARNING Purge with sufficient N
WARNING Do not use the pump for another process without a previous
PM10U

Important Prior Warnings

Keep out from under the pump when lifted.
Only qualified personnel shall unload and lift the pump.
sideways, because the width of the pump is small to its height.
electrician.
All national and local electrical regulations must be observed.
and maintenance work.
Do not switch on the power supply to the pump until work is
completed.
gas to the exhaust piping when necessary to dilute
2
the inflammable or toxic gas up to a safe concentration.
2
vacuum and exhaust piping.
Do not let inflammable, toxic or dangerous materials
disperse and guard against contact with the human body.
Always work in a location with an escape route in an emergency.
overhaul. Gases or reaction products remaining in the pump will
react and lead to accidents with the formation of large amounts of
products.
gas before removing and washing the
iii
（ ）
EBARA
CORPORATION