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Nitrogen (N2); Returning To Service - EBARA ESA25-D Instruction Manual

Multi-stage dry vacuum pump

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P.8

3.4.3 Nitrogen (N2)

1. Close [facility] nitrogen supply valve and follow facility procedures for
locking this valve in the off position.
2. Verify that the nitrogen pressure gauge (on front panel of the pump) drops
to 0 MPa, confirming that no pressurized gas energy is stored in the pump.
3. Pull out the red detent ring on the N2 regulator.
4. Turn knob counterclockwise until pressure gauge reads 0 MPa. (Both N2
regulator knob and nitrogen pressure gauge are located on front panel of
the pump.)
5. Disconnect tube connection of N2 supply line by turning tube nut
counterclockwise.
6. Plug (cap) ¼" tube connector on the pump with a tube fitting cap.

3.4.4 Returning to Service

1. Unlock and open water and nitrogen valves.
2. Remove handle stop bracket and switch circuit breaker on.
Restart pump and open foreline valve only after appropriate leak checks
and safety verifications.
PM10U
EBARA
CORPORATION

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