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Lubricant Oil - EBARA ESA25-D Instruction Manual

Multi-stage dry vacuum pump

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P.56
(2) When an exhaust gas scrubber unit is used, close the inlet valve of the
exhaust gas scrubber after the N
remove the piping.
(3) Be sure to switch off the power supply.
(4) After you have washed the piping do not reconnect until it has dried
completely.

8.4 Lubricant Oil

CAUTION
CAUTION
When oil low alarm is generated ,please refill the oil as following procedure.
(1) Stop the pump and remove the left-hand side pump cover to the utilities.
(2) After you have waited until the internal pump pressure returns to
atmospheric (normal) pressure, remove the plug from the oil-filler inlet.
(See Fig. 8.1 and 8.2)
(3) Check the level through the window of the gauge. Then, add the oil so that
the level is between the upper and lower limit lines.
(See Figs. 8.1 , 8.2 and 8.3)
(4) After you have checked that there are no depositions and fragments
adhering to the O ring attached to the plug, close the oil-filler inlet.
(5) Fit a waste oil container (PVC bag) to the bottom of the oil drain hole of the
secondary reservoir and remove the drain plug. (See Figs. 8.1 and 8.2)
(6) When you have drained off the waste oil close the drain hole after you have
checked that there are no deposition and fragments adhering to the O-ring
attached to the plug.
PM10U
gas purge has been discontinued and then
2
Do not start filling oil until the interior pump pressure has
reached atmospheric pressure. The chamber containing the oil
is under low pressure (vacuum) so that a significant leak will
occur causing substantial damage to the pump when the
oil-filling plug is removed with the pump operating.
Waste oil shall be disposed of by industrial waste disposal
dealer in accordance with Material Safety Data sheets.
(appendix1,2)
EBARA
CORPORATION

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