Vacuum And Exhaust Piping - EBARA ESA25-D Instruction Manual

8.3 Vacuum and Exhaust Piping

WARNING
WARNING
WARNING
Toxic gases may be generated from by-products in the piping or pump in pump
disconnection from the tool piping for repair and replacement or flange removal
for maintenance. Gain relevant information about the process gases from your
tool suppliers, and be sure that the gas concentrations in the work areas are at
quarter or under the acceptable values specified using appropriate measurement
equipment.
Without assurance of gas safety, instruct the workers to wear proper personnel
protective equipment if necessary to protect them from gas hazards.
personnel protective equipment must include at least gloves, safety goggles, and
a gas mask.
Be sure to following the instructions below when carrying out maintenance work
on the vacuum and exhaust piping of the pump.
(1) Before you remove and wash the piping be sure to purge with a sufficient
volume of N
PM10U
Maintenance on the vacuum and exhaust piping shall be
performed by taking proper action to avoid the dispersion of
inflammable, toxic and/or hazardous substances and to prevent
physical contact with, and absorption of, these substances.
The pump and exhaust piping will remain at a high
temperature
during operation and for a short time after the pump has
stopped.
Be sure to avoid contact and keep inflammable substances out
of reach.
Do not remove the outer cover during operation.
Be sure to check for gas leaks after you have finished pipe
maintenance work. Leaks will cause serious danger due to the
discharge of harmful and hazardous substances and the
occurrence of unpredictable reactions associated with the
admission of air into the pump. When checking for gas leaks by
pressurization, please pressurize by less than 0.05 MPa into the
purge port and do check.
gas.
2
P.55
The
EBARA
CORPORATION