EBARA ESA25-D Instruction Manual page 53

ALARM name
MP casing temp.
MP motor temp.
MP no current
Back pressure high
Emergency off
EXT. interlock
IO communication error
PM10U
Table 6.2 Alarm code list
Code
1st 2nd
WARNING name
code code
50 01 Cooling water flow low
52 00 MP casing temp. high
60 00 Oil level low
63 00 Pump box temp. high
71 00 Pump N
74 00 Back pressure high
81 01 Back pressure sensor damaged (▲)
IO communication error(IO board)
IO communication error(C_IO board)
Pump N
MP current high
"▲" indicates that the item is optional.
flow low
2
(▲)
valve error
2
EBARA
P.35
Code
1st 2nd
code code
00 01
05 01
08 00
13 00
18 01
21 01
21 02
26 03
26 07
27 02
31 15
CORPORATION