EBARA ESA25-D Instruction Manual page 61

[ NOTE ]
[ NOTE ]
DIP SW-B. No.6
DIP SW-B. No.8
DIP SW-C. No.1 Can be select Normal Open / Normal Close of Pump N
DIP SW-C. No.3 Can be select Normal Open / Normal Close of Back Pressure
DIP SW-C. No.7,8 Set the DIP SW-C.7,8 according to operating voltage.(see
PM10U
The N gas selector valve is positioned on the front panel at the
2
right when viewing facing the pump front panel (operating panel).
It takes ten odd seconds until the flow has stabilized after you have
operated the N gas selector valve.
2
Activate or inactive the special interface.
･ Set this to OFF to activate the interface (optional).
･ Set this to ON to inactivate the interface (default).
Locks or unlocks the currently selected operation status
display, which usually returns to the power display in 60
seconds.
WARNING.
ALARM.
Table 6.7)
Table 6.7 Setting DIP SW-C.7,8 (Operating Voltage)
Operating Voltage
C7
C8
200V 400V
OFF ON
OFF OFF
P.43
2
EBARA
CORPORATION