Inlet-Strainer (Interstage Pumps Only); Inlet-Flange Seals; Accessories; Installation - Edwards EXT200/200H LCMS Instruction Manual

Split flow compound turbomolecular pumps
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B756-01-880 Issue J
7.3.2

Inlet-strainer (interstage pumps only)

The EXT70/200Hi and EXT200/200Hi Split Flow Pumps are supplied with inlet-strainers for the interstage- port. The
Item Number of a replacement inlet-strainer is given below.
Flange size
NW25ISO-K
7.3.3

Inlet-flange seals

EXT Split Flow Pumps are supplied with inlet seals. The Item Numbers of replacement seals are given below.
Flange size
Inlet-flange seal
DN100ISO-K
ISO100 trapped o-ring, fluoroelastomer
DN63ISO-K
ISO63 trapped o-ring, fluoroelastomer
7.4

Accessories

7.4.1

Installation

The accessories available for use with the EXT Split Flow Pumps are described in the following sections.
shows how the accessories are fitted to an EXT Split Flow Pump.
7.4.2

EXDC drive modules

Fit an EXDC Drive Module as an alternative to an EXC Controller and pump-to-controller cable.
Drive Module
EXDC160 24 V 45 deg
EXDC160 80 V
*
Pump system originally supplied with D396-46-510 (unpackaged)
7.4.3

EXC controllers

The Edwards EXC Controllers provide the facilities necessary for operating a pumping system based on an EXT70/
200H, EXT70/200Hi, EXT200/200H or EXT200/200Hi Split Flow Pump. The Item Numbers of the EXC Controllers are
given below.
Controller
EXC100E
EXC100L
EXC120
EXC300
Page 30
Table 9 - Inlet-strainer (interstage pumps only)
Item Number
A223-05-067
Table 10 - Inlet-flange seals
Table 11 - EXDC drive modules
Item Number
D396-46-600
D396-41-000
Table 12 - EXC controllers
Voltage
90 - 264 V a.c.
90 - 264 V a.c.
90 - 264 V a.c.
90 - 132/180 - 264 V a.c.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Item Number
B271-58-171
B271-58-170
*
Item Number
D396-20-000
D396-22-000
D396-16-000
D396-14-000
© Edwards Limited 2010. All rights reserved.
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