User Manuals: Edwards nEXT85 Turbomolecular Vacuum Pump

Manuals and User Guides for Edwards nEXT85 Turbomolecular Vacuum Pump. We have 4 Edwards nEXT85 Turbomolecular Vacuum Pump manuals available for free PDF download: Instruction Manual, Original Instructions Manual

Edwards nEXT85 Instruction Manual (106 pages)

Brand: Edwards | Category: Water Pump | Size: 4 MB

Copyright Notice

2
Trademark Credits

2
- Declaration of Conformity
  3
- Table of Contents
  5
List of Figures

9
List of Tables

10
Safety and Compliance

11
- Definition of Warnings and Cautions
  11
- Safety Symbols
  11
Overview of the Next85

12
- Motor Controller
  13
- Operational Features
  13
  - Power Limit Setting
    14
  - Standby Speed
    14
  - Timer
    14
  - Analogue Output
    14
  - Automatic Vent Options
    15
  - Normal Speed Setting
    15
  - Electronic Braking
    15
- Logic Interface
  16
Install the Next85

19
Configuration

35
- Configure the Pump Using Serial Commands
  35
  - Message Structure
    36
  - Command and Reply Table Definitions
    36
  - Table 3 Command Abbreviations
    36
  - Power Limit Setting
    37
  - Powering a Fan from the Motor Controller
    37
  - Table 4 Power Limit Setting
    37
  - Controlled Venting Options
    38
  - Standby Speed Setting
    39
  - Normal Speed Setting
    39
  - Timer Setting and Options
    40
  - Analogue Signal Options
    41
  - Electronic Braking Options
    41
  - Table 5 Analogue Signal Options
    41
  - Factory Settings
    42
  - Assigning a Multi-Drop Address
    42
- Configure the Pump Using a TIC
  43
Operation of the Next85

44
Maintain the Next85

58
- Bearing and Oil Cartridge Maintenance
  59
- Rotor Life
  59
- Cleaning the Pump
  59
- Decoding Service Status Words
  59
- Controller Run Time
  60
- Table 11 Service Flags
  60
- Pump Run Time
  61
- Pump Cycles
  61
- Bearing Run Time
  61
- Oil Cartridge Run Time
  61
Storage

63
Disposal

64
Troubleshooting

65
Service

74
Spares

76
Accessories for the Next85

78
- Air Cooler
  79
- Water Cooler
  79
- Figure 10 Accessories
  79
- Table 24 Air Cooler
  79
- Bakeout (Heater) Band
  80
- TAV5 Vent Valve
  80
- Table 25 Water Cooler
  80
- Table 26 Bakeout Band
  80
- Table 27 TAV5 Vent Valve and Vent Port Adaptor
  80
- VRX Vent Restrictor
  81
- Vent Port Adaptor
  81
- PRX Purge Restrictor
  81
- Interface Cable
  81
- Table 28 VRX Vent Restrictor
  81
- Table 29 Vent Port Adaptor
  81
- Table 30 PRX Purge Restrictor
  81
- Table 31 Interface Cable
  81
- Nst PC Program
  82
- Auxiliary Connector
  82
- Auxiliary Extension Cable
  82
- Table 32 Auxiliary Connector
  82
- Table 33 Auxiliary Extension Cable
  82
- Auxiliary 'Y' Cable Adaptor
  83
- Base Mounting Adaptor
  83
- Table 34 Auxiliary 'Y' Cable Adaptor
  83
- Table 35 Base Mounting Adaptor
  83
Technical Reference

84

Edwards nEXT85 Instruction Manual (112 pages)

Turbomolecular pumps

Brand: Edwards | Category: Water Pump | Size: 3 MB

Table of Contents
7
Safety and Compliance
13
Definition of Warnings and Cautions
13
Safety Symbols
13
Introduction
15
Overview
15
Motor Controller
16
Operational Features
17
Power Limit Setting
17
Standby Speed
17
Timer
17
Analogue Output
18
Automatic Vent Options
18
Normal Speed Setting
19
Electronic Braking
19
Logic Interface
19
USB Interface
20
Parallel Control and Monitoring
20
Serial Control and Monitoring
20
Serial Control with Parallel Monitoring
21
Parallel Control with Serial Monitoring or Serial Configuration
21
Motor Controller Configuration (Serial Configuration)
21
Technical Data
23
General Technical Data
23
Figure 1 Dimensions - Next85 ISO63
23
Figure 2 Dimensions - Next85 CF63
24
Figure 3 Dimensions - Next85 ISO100
24
Figure 4 Dimensions - Next85 DN40
24
Operating and Storage Conditions
25
Vent Gas Specification and Vent Control Data
25
Figure 5 Typical Base View
25
Purge Gas Specification
26
Figure 6: Maximum Allowed Rate of Pressure Rise During Venting: Pressure against Time (with Pump Initially at Full Rotational Speed)
26
Cooling Water
27
Electrical Data
27
Figure 7 Maximum Relative Humidity to Avoid Condensation with Water Cooling
27
Pumping Media
28
Materials Exposed to Gases Pumped
29
Logic Interface Connector
30
Figure 8 Interface Circuits for Next Turbo Pump Controllers
32
Motor Controller Auxiliary Connector Socket
33
Indicator Leds
34
Figure 9 Valve Connector
34
Pump Performance Data
35
Figure 10 Next85 Pumping Speed Versus Inlet Pressure Performance Graph
36
Figure 11 Next85 Compression Ratio Versus Backing Pressure Graph
36
Installation
40
Unpack and Inspect
40
Figure 12 Typical Pumping System with a Next Pump
41
Connect to the Vacuum System
42
Remove and Replace the Inlet Screen
42
Mount the Pump
43
Backing Port Connection
45
Figure 13 Allowable Pump Orientation
45
Interstage Connection
46
Purge Gas Connection
46
Recommended Purge Gas Flow
46
Connect the Purge Gas
46
Electrical Installation
46
Ground the Connections
47
Connect the Logic Interface to the TIC or TAG
47
Connect the Logic Interface to the Control Equipment
47
Connect the Parallel Control and Monitoring
48
Connection for Serial Control and Monitoring
50
Connect the Serial Interface to the Customer Control Equipment
50
Figure 14 Logic Interface Connections - Parallel Control
50
Figure 15 Motor Controller Status Information
51
Figure 16 Logic Interface Connections - RS232 Serial Control
51
Serial Enable
52
Serial Protocol
52
Figure 17 Logic Interface Connections - RS485 Serial Control
52
Command Set
53
Multi-Drop Operation
57
Figure 18 Conceptual Diagram for Multi-Drop Connection Using RS232 Interface
58
Connection for Mixed Parallel and Serial Operation
59
Figure 19 RS485 Multi-Drop Connection
59
Cooling
60
Cooling Requirements
60
Figure 20 Logic Interface Connection - Mixed Parallel and Serial Operation
60
Forced Air Cooling
61
Water Cooling
61
Configuration
63
Configure the Pump Using Serial Commands
63
Message Structure
63
Command and Reply Table Definitions
64
Power Limit Setting
64
Power Supply to the Fan from the Motor Controller
65
Controlled Venting Options
65
Standby Speed Setting
66
Normal Speed Setting
67
Timer Setting and Options
67
Analogue Signal Options
68
Electronic Braking Options
69
Factory Settings
69
Assigning a Multi-Drop Address
69
Configure the Pump Using a TIC
70
Operation
72
Before Starting the Pump
72
Close the Vent Valve
72
Pre-Start Sequence
72
Vent Options, Vent Valve Connection and Control
73
Manual Vent Valve
73
TAV5 Solenoid Vent Valve
73
Vent Valve Control
74
Alternative Valve Connected to the Vacuum System
76
Figure 21 Auxiliary Interface Connection
76
Operation with Parallel Control and Monitoring
77
Start the Pump
77
Run the Pump at Standby Speed
77
Stop the Pump
77
Parallel Monitoring
78
Operation with Serial Control and Monitoring
78
Delayed Start
78
Start the Pump
78
Run the Pump at Standby Speed
79
Stop the Pump
79
Monitor Temperature Readings
80
Monitor Link Parameter Readings
80
Monitor Measured Motor Speed
80
Mixed Parallel and Serial Operation
81
Operation with a TIC or TAG
82
Decelerating and Venting
82
Figure 22 Serial and Parallel Control Flowchart
82
Operation at Extreme Conditions
83
Operation with High Inlet Pressure
83
Operation at High Temperatures
83
Protection against Over-Speed
84
Electrical Supply Failure
84
Bakeout
85
Shut down the Pump Manually
86
Maintenance
87
Bearing and Oil Cartridge Maintenance
87
Rotor Life
87
Cleaning the Pump
87
Decoding Service Status Words
88
Controller Run Time
89
Pump Run Time
89
Pump Cycles
89
Bearing Run Time
90
Oil Cartridge Run Time
90
Fault Finding
91
The Pump Does Not Rotate after a Parallel Start Command Is Sent
91
The Pump Does Not Rotate after a Serial Start Command Is Sent
91
The Pump Does Not Respond in Multi- Drop Mode
91
The Green Normal LED Does Not Light or the Pump Does Not Rotate at Full Speed or the Pump Fails While in Operation
92
Ultimate Pressure Cannot be Reached
92
The Pump Is very Noisy or There Is Excessive Vibration or both
93
No Serial Comms
93
Fail Signal or Standby Signal Not Working
93
Yellow Service LED Is Flashing a Repeated Sequence
94
The Red Alarm LED Is on
94
The Red Alarm LED Is Flashing
94
Other Problems
94
Command Set Error Codes
94
Flashing Service Codes
95
Flashing Error Codes
95
Decoding System Status Words
96
Service Information
98
Storage
100
Disposal
101
Service
102
Return the Equipment or Components for Service
102
Bearing and Oil Cartridge On-Site Maintenance
103
Spares
104
Inlet Screen
104
Inlet Strainer
104
Inlet Flange Seals and Integrated Inlet Screens
104
NW16 and NW25 Ports
105
Accessories
106
Air Cooler
106
Water Cooler
106
Figure 23 Accessories
106
Flange Heater
107
TAV5 Vent Valve
107
VRX Vent Restrictor
107
Vent Port Adaptor
108
PRX Purge Restrictor
108
Interface Cable
108
Nst PC Program
108
Auxiliary Connector
109
Auxiliary Extension Cable
109
Auxiliary 'Y' Cable Adaptor
110
Base Mounting Adaptor
110

Edwards nEXT85 Instruction Manual (33 pages)

Service Tool Kit

Brand: Edwards | Category: Industrial Equipment | Size: 2 MB

Edwards nEXT85 Original Instructions Manual (28 pages)

SERVICE TOOL KIT

Brand: Edwards | Category: Water Pump | Size: 6 MB

Edwards Categories

Water Pump Control Unit Industrial Equipment Measuring Instruments Controller

More Edwards Manuals

User Manuals: Edwards nEXT85 Turbomolecular Vacuum Pump

Edwards nEXT85 Instruction Manual (106 pages)

Table of Contents

Copyright Notice

Trademark Credits

List of Figures

List of Tables

Safety and Compliance

Overview of the Next85

Install the Next85

Configuration

Operation of the Next85

Maintain the Next85

Storage

Disposal

Troubleshooting

Service

Spares

Accessories for the Next85

Technical Reference

Edwards nEXT85 Instruction Manual (112 pages)

Table of Contents

Edwards nEXT85 Instruction Manual (33 pages)

Table of Contents

Edwards nEXT85 Original Instructions Manual (28 pages)

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