Edwards HT10 Instruction Manual
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Edwards HT10 Instruction Manual

High throughput diffusion pumps
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Description
HT10 High Throughput Diffusion Pumps
Description
HT16 High Throughput Diffusion Pumps
Instruction Manual
HT10 and HT16 High Throughput
Diffusion Pumps
Voltage
200 V
220 V
380 V
400 V
415 V
440 V
460 V
480 V
Voltage
200 V
220 V
380 V
400 V
415 V
440 V
460 V
480 V
Item Numbers
ANSI10/ANSI2
EO 12 inch/EO 130 mm
Inlet/Outlet
Inlet/Outlet
B311-01-200
B311-02-200
B311-01-220
B311-02-220
B311-01-380
B311-02-380
B311-01-400
B311-02-400
B311-01-415
B311-02-415
B311-01-440
B311-02-440
B311-01-460
B311-02-460
B311-01-480
B311-02-480
Item Numbers
ANSI16/ANSI3
Inlet/Outlet
B312-04-200
B312-04-220
B312-04-380
B312-04-400
B312-04-415
B312-04-440
B312-04-460
B312-04-480
B311-01-880
Issue K Original
ISO320/ISO63
Inlet/Outlet
B311-03-200
B311-03-220
B311-03-380
B311-03-400
B311-03-415
B311-03-440
B311-03-460
B311-03-480
ISO500/ISO100
Inlet/Outlet
B312-05-200
B312-05-220
B312-05-380
B312-05-400
B312-05-415
B312-05-440
B312-05-460
B312-05-480

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Summary of Contents for Edwards HT10

  • Page 1 B311-01-880 Issue K Original Instruction Manual HT10 and HT16 High Throughput Diffusion Pumps Item Numbers Description Voltage ANSI10/ANSI2 EO 12 inch/EO 130 mm ISO320/ISO63 Inlet/Outlet Inlet/Outlet Inlet/Outlet HT10 High Throughput Diffusion Pumps 200 V B311-01-200 B311-02-200 B311-03-200 220 V B311-01-220...
  • Page 2 RH15 9TW, UK declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s) HT10 Vapour Diffusion Pumps: B311-01-200, B311-01-220, B311-01-240, B311-01-380, B311-01-400, B311-01-415, B311-01-460, B311-01-480, B311-02-200, B311-02-220, B311-02-240, B311-02-380,...
  • Page 3 These parts can safely be used for the environmental protection use period as indicated. Pump Type Pump Size Diffusion Pumps Diffstak 63, 100, 160, 250 Vapour Boosters 30B5, 18B4 High Throughput Pumps HT10, 16, 20 材料成分声明 Materials Content Declaration 危险物质 Hazardous Substances 部件名称 六价铬 多溴二苯醚 铅...
  • Page 4 This page intentionally blank.

  • Page 5: Table Of Contents

    Introduction ......................28 4.5.2 Fully-valved pumping systems ..................28 4.5.3 Partially-valved pumping systems ..................30 4.5.4 Valveless pumping systems ....................30 Maintenance ..................31 © Edwards Limited 2008. All rights reserved. Page i Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 6 Spares common to HT10 and HT16 ...................47 Accessories .......................47 7.4.1 Thermal probe ......................47 7.4.2 Heat shield .......................47 7.4.3 Inlet baffle .......................48 Page ii © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 7 Terminal-box (with cover removed) .................21 Fully-valved pumping system ..................29 Partially-valved pumping system ..................29 Valveless pumping system .....................29 Thermal snap-switches ....................36 HT10 pump base (with outer radiation shield removed) ............38 HT16 pump base (with outer radiation shield removed) ............39 Tables Table Page Performance and operating conditions data ................
  • Page 8 ® Apiezon is a registered trademark of M & I Materials. ® Santovac is a registered trademark of Santovac Fluids Inc. Page iv © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 9: Introduction

    This manual provides installation, operation and maintenance instructions for the Edwards HT10 and HT16 High Throughput Diffusion Pumps. You must use the HT10 and HT16 pumps as specified in this manual. Read this manual before you install and operate the pump. Important safety information is highlighted as WARNING and CAUTION instructions;...

  • Page 10: Description

    These configurations are listed on the front cover and the following notation is used: ‘ANSIxx’ means an ANSI xx inch flange (for example, ANSI16 means an ANSI 16 inch flange) ‘EO xx inch’ means an Edwards xx inch flange (and, for example, ‘EO 130 mm’ means an Edwards 130 mm flange) ‘ISOxx’...

  • Page 11: Over-Temperature And Auxiliary Protection

    Application Note P400-50-000 from your supplier or Edwards . © Edwards Limited 2008. All rights reserved. Page 3 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 12: Ht10 Pump Sectional View

    B311-01-880 Issue K Figure 1 - HT10 pump sectional view Page 4 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 13 28. Not used 43. Outer thermal shield 14. Interior locating-pin 29. Not used 44. Body tube 15. Base assembly 30. Secondary-cap © Edwards Limited 2008. All rights reserved. Page 5 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 14: Ht16 Pump Sectional View

    B311-01-880 Issue K Figure 2 - HT16 pump sectional view Page 6 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 15 14. Base assembly 30. Top-jet cap 46. O-rings 15. Oil drier 31. Cooling-water tubes 47. Drain-plug 16. Radiation shield 32. O-rings © Edwards Limited 2008. All rights reserved. Page 7 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 16 B311-01-880 Issue K This page has been intentionally left blank. Page 8 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 17: Technical Data

    Figure 6 shows the time for the pumps to warm-up from an ambient temperature of approximately 20 °C to a final operating temperature of approximately 210 °C for the HT10 and approximately 240 °C for the HT16. Figure 7 shows the time for the pumps to cool down from operating temperature to approximately 90 °C.

  • Page 18: Mechanical Data

    Over-temperature protection system fuses Transformer supply 630 mA, 1.25-inch 630 mA, 1.25-inch Control circuit supply 2.5 A, 20 mm 2.5 A, 20 mm Page 10 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 19: Pump Fluid Data

    B311-01-880 Issue K Pump fluid data Note: Edwards Material Safety Data Sheets for the fluids specified in Table 4 are available on request. Table 4 - Pump fluid data HT10 HT16 Pump fluid charge (dry) 1750 ml 3000 ml Pump fluid charge (wet)

  • Page 20: Pump Dimensions (Mm): Ht10 Shown

    Figure 3 - Pump dimensions (mm): HT10 shown Key → ANSI ANSI inlet inlet inlet outlet outlet outlet HT10 HT16 1214 Page 12 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 21: Ht10 Performance Curves

    Figure 4 - HT10 performance curves 1. Pumping speed (l s ) plotted against pressure (mbar/Pa) for He 2. Pumping speed (l s ) plotted against pressure (mbar/Pa) for N2 3. Throughput (mbar l s ) plotted against pressure (mbar/Pa) for He 4.

  • Page 22: Ht16 Performance Curves

    Figure 5 - HT16 performance curves 1. Pumping speed (l s ) plotted against pressure (mbar/Pa) for He 2. Pumping speed (l s ) plotted against pressure (mbar/Pa) for air 3. Throughput (mbar l s ) plotted against pressure (mbar/Pa) for He 4.

  • Page 23: Pump Warm-Up Curves: Temperature Of Base Flange (°C) Plotted Against Time

    1. HT10 2. HT16 Figure 7 - Pump cool-down curves: temperature of base flange (°C) plotted against time 1. HT10 2. HT16 © Edwards Limited 2008. All rights reserved. Page 15 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 24 B311-01-880 Issue K This page has been intentionally left blank. Page 16 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 25: Installation

    Outlet-port O-ring Locate the pump WARNING Use suitable lifting equipment to locate the pump. The mass of the HT10 pump is 80 kg; the mass of the HT16 pump is 185 kg. WARNING Do not touch any part of the pump when it is switched on. Avoid contact between the pump and combustible materials, plastic materials and electrical cables.

  • Page 26: Electrical Connections

    4. Plug the auxiliary plug (supplied in the fitting-kit) into its socket on the front of the electrical-box. This plug is supplied pre-wired and the pump will not operate if the plug is not fitted. Page 18 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 27: Pump Electrical Block Diagram

    Figure 8 - Pump electrical block diagram 1. Heaters 6. Contactor A. Terminals for heater insulation 2. Terminal-block 7. Transformer resistance measurement 3. Auxiliary contacts 8. Auxiliary socket 4. Terminal-box 9. Thermal snap-switch assembly 5. Fuse holder...

  • Page 28: Over-Temperature Protection

    Over-temperature protection The operating temperature and the position of the thermal snap-switch assembly are factory set for use with DC704EU fluid. If you wish to use other fluid types, please contact your supplier or Edwards for advice. 3.3.3 Auxiliary plug connections...

  • Page 29: Auxiliary Plug Wiring

    1. Link wire Figure 10 - Terminal-box (with cover removed) 1. Earth (ground) terminal 2. Auxiliary terminals 3. Electrical supply terminals © Edwards Limited 2008. All rights reserved. Page 21 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 30: Cooling-Water Connections

    Before you fit the pump to the system, ensure that all sealing-faces are clean and scratch-free; refinish these faces if necessary. Page 22 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 31: Leak-Test The System

    PFPE fluids are very dangerous. Use a silicone fluid (for example, DC704EU) or an alkyl naphthalene fluid (for example, Edwards L9) in the pump. The thermal breakdown products of some fluids can be dangerous; details of the breakdown products are given in Table 8.
  • Page 32 > 260 Decomposed Highly aggressive Potentially polyether fluorocarbons materials. fatal including Poisonous and hydrofluoric caustic by acid inhalation and skin contact. Page 24 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 33: Operation

    Section 2.1) Always allow the pump to cool (for at least 60 minutes for the HT10; 90 minutes for the HT16) before the pump-inlet and backing pressures are allowed to rise above their critical values. © Edwards Limited 2008. All rights reserved.

  • Page 34: Check The Insulation Resistance Of The Heaters

    4. When the pressure in the backing pipeline is less than 0.1 mbar (10 Pa), switch on the electrical supply to the HT pump heaters. 5. Allow sufficient time for the pump to heat up to operating temperature (approximately 40 minutes for the HT10; approximately 80 minutes for the HT16 - see Figure 6.

  • Page 35: Partially-Valved Pumping System

    0.1 mbar (10 Pa). 5. Allow sufficient time for the pump to heat-up to operating temperature (approximately 40 minutes for the HT10; approximately 80 minutes for the HT16 - see Figure 6. Close the roughing valve (3) and then open the high-vacuum isolation-valve (7) slowly, so that you do not stall the pump.

  • Page 36: Pump Shut-Down

    1. Close the high-vacuum isolation-valve (8). Switch off the HT pump heaters and allow the pump to cool (for at least 60 minutes for the HT10; 90 minutes for the HT16). If you do not allow the pump to cool before you admit air, on re-evacuation the pump fluid will superheat and evolve vapour which will pass into the backing pipeline.
  • Page 37 8. HT pump air-admittance valve Figure 13 - Valveless pumping system 1. Vacuum system 2. Air-admittance valve 3. Backing pump 4. HT pump © Edwards Limited 2008. All rights reserved. Page 29 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 38: Partially-Valved Pumping Systems

    1. Close the high-vacuum isolation-valve (7). 2. Switch off the HT pump heaters and allow the pump to cool (for at least 60 minutes for the HT10; 90 minutes for the HT16). If you do not allow the pump to cool before you admit air, on re-evacuation the pump fluid will superheat and evolve vapour which will pass into the backing pipeline.

  • Page 39: Maintenance

    Do not remove the dipstick or open the drain-plug to vent the pump while the pump is operating or under vacuum. Use suitable lifting equipment when you move the pump (HT10 pump mass is 80 kg; HT16 pump mass is 185 kg).

  • Page 40: Maintenance Plan

    If the fluid is in a satisfactory condition, refill the pump as described in Section 3.7 and refit it to the system. Page 32 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 41: Clean The Pump

    When you refit the cool-cap assembly, tighten the clamping nut just sufficiently to hold the assembly in position. You will damage this assembly if you overtighten it. © Edwards Limited 2008. All rights reserved. Page 33 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 42: Clean The Ht16 Pump

    (13). Ensure that the pin engages correctly into the locating slot in the pump base. When you refit the cool-cap, tighten the fixing screw (26) to 1.4 N m. Page 34 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 43: Clean The Condenser Assembly

    4. Withdraw the assembly together with the grommet from the rear of the enclosure. 5. Refit the assembly: use Steps above in reverse order. © Edwards Limited 2008. All rights reserved. Page 35 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 44: Heater Maintenance

    Take care when you remove the mica insulators, which become brittle after long use. Figures show the HT10 and HT16 pump heater assemblies. Use the procedure below to remove the heaters. 1. Drain the pump and remove the interior assemblies as described in Sections to 5.6.

  • Page 45: Fit The New Heaters

    To fit the new heaters, use the procedure below. 1. Inspect the base assembly and check that it is flat and undistorted. If it is distorted, contact Edwards or your supplier. 2. Place the heaters over the studs with the terminals in approximately their final positions. Coat the threads lightly with a heat-resistant anti-seize compound and screw the fixing nuts down, finger-tight only.

  • Page 46: Ht10 Pump Base (With Outer Radiation Shield Removed)

    B311-01-880 Issue K Figure 15 - HT10 pump base (with outer radiation shield removed) 1. Bus bar 1 6. Radiation shield 2. Bus bar 2 7. Heater assembly 3. Heaters (3 off) 8. Outer insulating disk 4. Terminal block 9. Outer shield 5.

  • Page 47: Ht16 Pump Base (With Outer Radiation Shield Removed)

    9. Outer insulating disks (2 off) 4. Terminal block 10. Outer shield 5. Bus bar 4 11. Inner insulating disk 6. Bus bar 3 © Edwards Limited 2008. All rights reserved. Page 39 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 48: Fault Finding

    5.11 Fault finding A list of fault conditions and their possible causes is provided here to assist you in basic fault finding. If problems persist, contact your supplier or your nearest Edwards Service Centre. 5.11.1 The pump will not start The electrical supply connections are disconnected.

  • Page 49: High-Pressure Pumping Speeds

    The cooling-water temperature is too high. The pump is stalled due to a high gas load or high backing pipeline pressure. © Edwards Limited 2008. All rights reserved. Page 41 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 50 B311-01-880 Issue K This page has been intentionally left blank. Page 42 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 51: Storage And Disposal

    Fluoroelastomers which may have been subjected to temperatures above 260 °C (see Section 5.1) Components which have been contaminated with dangerous process substances. © Edwards Limited 2008. All rights reserved. Page 43 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 52 B311-01-880 Issue K This page has been intentionally left blank. Page 44 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 53: Service, Spares And Accessories

    For more information about service options, contact your nearest Service Centre or other Edwards company. Spares The spare parts available from Edwards for the HT10 and HT16 diffusion pumps are listed in the following Sections. © Edwards Limited 2008. All rights reserved.

  • Page 54: Ht10 Spares

    220 V H017-06-021 380 V H017-06-022 400 V H017-06-023 415 V H017-06-024 440 V H017-06-028 460 V H017-06-025 480 V H017-06-026 Page 46 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 55: Spares Common To Ht10 And Ht16

    Thermal probe Note: The temperatures specified in this manual and on the curves shown in Figures were measured at the edges of the base flanges of the HT10 pump (Figure 1, Item 41) and the HT16 pump (Figure 2, Item 41).

  • Page 56: Inlet Baffle

    ) with only a small loss of pump performance. The inlet baffle accessory is only available for the HT16 pump, as the HT10 pump has a cool-cap which performs the same function as the inlet baffle. Accessory Item Number...

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