Nitrogen Flow Switch Assembly; Interface Modules - Edwards iXL600 Instruction Manual

A540-55-880 Issue D
7.3.10

Nitrogen flow switch assembly

Provides a signal when flow is within limits and may be used as an interlock.
Item
Nitrogen flow switch assembly
7.3.11

Interface modules

7.3.11.1 MicroTIM
Tool specific control & monitoring via parallel interface (except for LAM-LON & RS232 Micro-TIM's which are serial
interface devices).
MicroTIMs
SPI
MCM
TEL
Semi E73
LAM Alliance
C3
Hitachi
Config Storage
eTIM
LAM-LON
RS232
7.3.11.2 EMS modules
Tool specific emergency stop interfaces.
EMS Modules
SPI
MCM
TEL
Semi E73
LAM Alliance
C3
Hitachi
Page 46
Table 24 - Nitrogen switch assembly
Table 25 - MicroTIM modules
Table 26 - EMS modules
Edwards and the Edwards logo are trademarks of Edwards Limited.
Item number
A50797000
Item number
D37360310
D37360320
D37360330
D37360340
D37360350
D37360360
D37360370
D37360390
D37361500
D37362000
D37370385
Item number
D37370310
D37370320
D37370330
D37370340
D37370350
D37370360
D37370370
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