Supported External Devices
Alignment is supported for the following external devices.
Stages
Vision System FH/FZ5 Series
User's Manual (Z365)
X(Y)
θ axis: Direct drive
Xθ
θ axis: Linear drive
θ axis: Direct drive
Yθ
θ axis: Linear drive
θ axis: Direct drive
θX
θ axis: Linear drive
θ axis: Direct drive
θY
θ axis: Linear drive
XY
θ axis: Direct drive
XYθ
θ axis: Linear drive
θXY
θ axis: Direct drive
θ axis: Linear drive
XYθ
Direct fulcrum motion
UVW
Rotary fulcrum motion
Direct fulcrum motion
UVWR
Rotary fulcrum motion
Type
Camera axis movement: None
Camera axis movement: X axis
Camera axis movement: None
Camera axis movement: X axis
Camera axis movement: None
Camera axis movement: Y axis
Camera axis movement: None
Camera axis movement: Y axis
Camera axis movement: None
Camera axis movement: X axis
Camera axis movement: None
Camera axis movement: X axis
Camera axis movement: None
Camera axis movement: Y axis
Camera axis movement: None
Camera axis movement: Y axis
Camera axis movement: None
Camera axis movement: X axis
Camera axis movement: Y axis
Camera axis movement: XY axes
Camera axis movement: None
Camera axis movement: X axis
Camera axis movement: Y axis
Camera axis movement: XY axes
Camera axis movement: None
Camera axis movement: X axis
Camera axis movement: Y axis
Camera axis movement: XY axes
Camera axis movement: None
Camera axis movement: X axis
Camera axis movement: Y axis
Camera axis movement: XY axes
7
299
Alignment