Figure 5-4. Rear View Of Terminal Block Housing Without Strain Relief Attached - Advanced Energy Pinnacle 20 kW Manual

Figure 5-4. Rear view of terminal block housing without strain relief attached.

Note: The strain relief does provide output interlock, but it does not provide grounding.
When connecting the Pinnacle output to the system, ensure that the cable shield (also the
positive) connects with the chamber ground and that the negative wire (cable core) connects to
the target.
Negative Output
The most important configuration for sputtering applications is negative output (negative
voltage with respect to ground). To achieve negative output, connect the Pinnacle unit's
negative terminal on the output connector to the chamber's cathode. Connect the positive
terminal on the unit's output connector to the chamber's common or ground.
To make the output connections, strip approximately 1 cm of insulation from each end of the
output cable to expose the wires. Install proper ring lugs to stripped ends of wire. Tighten
terminal block nuts onto ring lugs.
For safety compliance, do not allow the maximum voltage at the Pinnacle unit's output
connector terminals to exceed ±1500 V with respect to ground when configuring for
floating output. Take into account allowances for ignition voltage (1500 V standard
ignition) when determining safety compliance.
Optimal Output Connection
We recommend using shielded output cable between the Pinnacle supply and your chamber
and connecting that cable in the manner described here. The shielded cable minimizes system
noise from chamber arcs and takes full advantage of the Pinnacle unit's improved process rate.
5702199-A
Page 139 of 182
Installation
Pinnacle™ 20 kW
5-11