Waters Xevo TQ MS Operator's, Overview And Maintenance Manual page 107

O-ring
3. Remove the spring and oil mist filter from the canister.
Warning:
the oil mist filter is correctly disposed of according to local
environmental regulations.The oil mist filter can be
contaminated with biohazards or toxic materials.
4. Dispose of the oil mist filter in accordance with local environmental
regulations.
5. Install the new oil mist filter in the canister.
To seat the new filter properly, press it down firmly when
Requirement:
installing it in the canister.
6. Ensure that the O-ring on the oil mist canister cover is correctly seated.
7. Center the spring on top of the oil mist filter.
8. Fit the spring over the collar on the oil mist canister cover, and then fit
the cover to the oil mist canister.
9. Use the 3-mm Allen wrench to fit and tighten the 4 screws securing the
oil mist canister cover to the oil mist canister.
Replacing the Varian roughing pump oil and oil mist filter
Oil mist canister cover
To avoid spreading contamination, ensure that
February 11, 2013, 71500130002 Rev. D
Spring
Oil mist filter
107