Cvu Voltage Sweep - Keithley 4200-SCS User Manual

Semiconductor characterization system
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Section 3: Common Device Characterization Tests

CVU Voltage Sweep

Figure 3-17
selected as the forcing function to measure Cp-Gp. The Sweeping test mode
must be selected for this test (see
Figure 3-17
Forcing Function: CVU Voltage Sweep
When this test is run (see
occurs:
1.
The DC source goes to the PreSoak voltage of -5 V for the hold time.
2.
The DC bias voltage goes to the first step of the sweep (1 V).
3.
After the built-in system delay and programmed delay, the 4210-CVU makes a
measurement. The AC test signal is applied just before the start of the measurement. AC
drive is turned off after the measurement is completed.
4.
Steps 2 and 3 are repeated for the 2 V and 3 V DC bias voltage steps. The Sweep delay
repeats at the beginning of each subsequent step.
The sweep delay, hold time and output disable are set from the
window for sweeping.
A dual CVU Voltage Sweep can be performed by selecting (checking) Dual in the
Forcing Functions / Measure Options window. After the last (stop) step is
measured, the sweep will continue in the reverse direction. For the force settings
shown in
and 1 V. The number of measurements will double to six.
3-22
shows an example of a FFMO window with CVU Voltage Sweep
Figure
Figure
3-17, the dual sweep will step as follows. 1 V, 2 V, 3 V, 3 V, 2 V,
Return to
Section Topics
Figure
3-11).
3-18), the following force-measure sequence
Model 4200-SCS User's Manual
Select Dual to perform
a dual sweep.
ITM timing
4200-900-01 Rev. K / February 2017

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