Running Autocalscope; Running Pulseivcal - Keithley 4200-SCS User Manual

Semiconductor characterization system
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Model 4200-SCS User's Manual
Figure 3-36
Project plan for Pulse-IV Complete

Running AutocalScope

AutocalScope should be run before any pulse calibration is performed. For best
Pulse IV results, the AutocalScope should also be run before the first experiments
of the day.
To run AutocalScope:
1.
2.
3.
4.
5.
6.
7.

Running PulseIVCal

Verify proper setup by running a scope-shot. For on-wafer testing, have a through,
or short, structure available, or ensure that sharing a pad for both the gate and
drain probes provides a good connection. There are two steps to the calibration,
open, and through/short.
To run PulseIVCal:
1.
2.
3.
4200-900-01 Rev. K / February 2017
The 4200-SCS should be turned on at least 30 minutes before performing any calibration or
measurements.
Double-click AutocalScope in the project navigator
Click the green Run button.
Follow the instructions given in the pop-up dialog box and disconnect all connections to the
scope card.
The scope performs an autocal, which takes about one minute.
The test is complete when the Run button turns green. In the Sheet tab,
autoCalStatus=0 means that there were no errors.
Reconnect the cables to the scope card. Use care when installing the cable to the scope
card trigger SMB connector.
If not already performed, run AutocalScope as explained above.
Double-click PulseIVCal in the project navigator (see
Click the green Run button to start the PulseIVCal.
Return to
Section 3: Common Device Characterization Tests
Section Topics
(Figure
3-36).
Figure
3-36).
3-39

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