Configuring Device Stress Properties - Keithley 4200-SCS User Manual

Semiconductor characterization system
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Section 3: Common Device Characterization Tests

Configuring device stress properties

Properties for device stressing are set from the Device Stress Properties windows
(see
Figure
Properties button on the Subsite Setup tab. The button is shown in
The device stress properties window that opens will be for the first device in the
subsite plan. There is a separate properties window for each device in the plan.
The properties window for each device is displayed by clicking the Next Device or
Prev Device button at the bottom of the window. The basic steps to configure
each device are provided in
illustration.
Figure 3-59
Device Stress Properties: Setup steps for first device in Subsite Plan
1
3
5
6
8
Table 3-25
Setup steps for the first device in the Subsite Plan
Step
Description
1
Select the wafer site number. See
2
Select DC Voltage Stress, DC Current Stress, or AC Voltage Stress. See
stressing.
3
Enter the stress values (V or I) and limit values (I or V).
4
If AC Voltage Stress was selected, select VPU Common Settings to open the window to make common settings for
the Keithley pulse card. See
5
Assign connection pin numbers for this device. With "AC Voltage Stress" selected, click "VPU" checkbox if connected
to the 4205-PG2.
On and Off determine the SMU sequence when powering DUTs. See
6
The Degradation Targets table lists the tests and Output Values for this device. Targets can be enabled and the
Target Values can be set in % or Absolute Value. Click to enable or disable all Targets. See
3-74
3-59). This window is opened by clicking the Device Stress
Figure
4
Multi-site
testing.
Setting AC stress
properties.
Return to
Section Topics
3-59. Details about configuration follow the
DC voltage, DC current, or AC voltage
Device pin
connections.
Model 4200-SCS User's Manual
Figure
3-51.
2
Degradation
targets.
4200-900-01 Rev. K / February 2017
7
11
12
13

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