How To Perform Reliability (Stress-Measure) Tests On My Device; Connecting Devices For Stress / Measure Cycling - Keithley 4200-SCS User Manual

Semiconductor characterization system
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Section 3: Common Device Characterization Tests

How to perform reliability (stress-measure) tests on my device

Connecting devices for stress / measure cycling

Devices that are stress / measure cycled in parallel are connected through a
switch matrix.
evaluation.
Figure 3-49
Stress / measure wiring example
4200-SCS
4210-
Ground
Unit
F
S
o
e
r
n
c
s
e
e
L
o
w
3-68
Figure 3-49
4210-
4210-
4210-
SMU
SMU
SMU
SMU
5
4
3
Preamp Preamp Preamp
Switch Matrix
8 ´ 36 (Three cards in
Mainframe)
1
2
6 Cables
1
2
6 Cables
1
2
Return to
shows an example of such connections for an HCI
4210-
SMU
2
1
GPIB
3
6 Cables
3
6 Cables
3
Section Topics
Model 4200-SCS User's Manual
During Characterization of Each Transistor
Vds = SMU3
Vgs = SMU1
Vbb = SMU2
Vss = Ground Unit
During Stress
SMU1 = Common Gate
SMU2 = Common Substrate
SMU3 = All Drains at 3.5 Volts
SMU4 = All Drains at 4.0 Volts
SMU5 = All Drains at 4.5 Volts
6
6
6
4200-900-01 Rev. K / February 2017

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