Attaching The Holders - Olympus MX63 Instructions Manual

b
d
e
90 90
2

Attaching the holders

TIP
Attaching the wafer holder
Place the edge of the wafer holder plate a on the stage gently.
1
2
Push the wafer holder plate from above to make sure that it is not tilted.
Secure the holder clamping screw b on the left side of the stage
3
using a flathead screwdriver.
NOTE
a
Attaching the mask holder
Place the mask holder c on the top surface of the stage carefully
1
and make sure that the holder is not tilted. Then, secure the mask
holder by tightening the holder clamping screw d on the left side of
the stage using the flathead screwdriver.
Attaching the black plate or glass plate
1
c Place the plate on the top surface of the stage carefully and tighten
the holder clamping screw on the left side of the stage.
NOTE
Adjusting the levelness of the holder plate
e
TIP
Attach a holder in the direction so that the notch on the side
surface of the holder comes to the left. The adjustment of the
levelness is performed in this direction.
The levelness of the holder is adjusted by the heights of
three screws on the bottom of the stage. Do not push the
peripheral area of the holder. The folder may be tilted.
When attaching the glass plate, do not tighten the
clamping screw excessively to prevent the glass plate
from cracking. Tighten the screw lightly to the extent that
the glass plate does not rattle noticeably when attached.
The levelness of the stage movement and the top surface
of the wafer holder have been adjusted as factory default.
However, if the finer adjustment is required or when using a
non-Olympus holder, apply drops of alcohol on screws e to
loosen the screw lock. Then, move the screws up and down
using a flathead screwdriver from below.