Olympus MX63 Instructions Manual page 20

Stage holder for MX63
Rotary wafer holder
For 3 or 4 inches (BH2-WHR43)
For 4 or 5 inches (BH2-WHR54)
For 5 or 6 inches (BH2-WHR65)
Rotary wafer holder plate
14 14
(BH3-WHP6)
6x6-inch stage
(MX-SIC6R2)
Rotary wafer holder plate
For 6 or 8 inches (MX-WHPR86)
Black plate
(BH3-SP6)
Glass plate
(BH3-SPG6)
Coarse adjustment grip (page 27)
(with a crutch)
X-axis/Y-axis knobs (page 27) X-axis/Y-axis knobs (page 27)
Coarse adjustment grip (page 27) Coarse adjustment grip (page 27) Coarse adjustment grip (page 27)
(with a crutch) (with a crutch) (with a crutch) (with a crutch)
8x8-inch stage
(MX-SIC8R)