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Installation space
To allow this microscope to deliver its full performance, secure the installation space having the minimum dimensions
described below before assembly and installation of the microscope.
The dimensions of the area enclosed in alternate long and two short dashes lines indicate the stage movable range. The
dimensions marked * vary depending on the lamp housing to be combined.
· For maintenance, you can secure a larger work space by changing the direction of the observation tube or
TIP
moving the stage.
· The following installation space is set according to the SEMI standard guidelines (SEMI S8-0915). It is
recommended to secure the appropriate installation space suitable for your operation referring to the following
installation space, appearance of the system, eye point height, etc.
MX63 installation space
8 8
Unit: mm
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