Stage holder for MX63L
6-inch mask holder
(MX-MH6)
X-axis/Y-axis knobs (page 27)
X-axis/Y-axis knobs (page 27)
Glass plate
(MX-SPG1412)
14x12-inch stage
(MX-SIC1412R2)
MX63/MX63L
Rotary wafer holder for 8-inch and 12-inch
(MX-WHPR128)
Coarse adjustment grip (page 27)
(with a crutch)
15
15