Maintenance; Routine Maintenance - EBARA EV-A Series Instruction Manual

Dry vacuum pump
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7.1 Routine Maintenance

Check pump condition such as power supply, ultimate pressure and back pressure etc. regularly
and verify that the pump is used under normal operating condition. Refer to P.46 (8. Trouble
shooting) section for trouble shooting if there is any error message and/or alarm lamp lit on the
control panel.
Lubricant oil refill is required if the oil level is below lower limit on level gauge. See P.42 (7.3
Lubricant oil) section for details.
Turn off the main switch on the pump and disconnect power cable before servicing. Do not
supply power before completion of service work.
Pump remains hot during and/or after operation. Avoid direct skin contact otherwise it may cause
burn. Keep combustible materials away from the product. Do not attempt to service the product
when it is hot.
Do not remove packaging covers during operation.
When pump error arises, press STOP/RESET switch on the controller or apply reset command at CN2
I/O connector (Pin No.2-10) after solving the problem. The error will be reset.
Deactivate pump run command signal before servicing if pump error arises during the operation
under remote control.
When pump abnormal condition arises other than error message and/or alarm lamp on the controller,
refer to P.46 (8. Trouble shooting) section for trouble shooting.
PM10U

7. MAINTENANCE

DANGER
WARNING
CAUTION
P.39
EBARA
CORPORATION

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This manual is also suitable for:

Ev-a06Ev-a06-1Ev-a06-2Ev-a06-3

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