Routine Inspection - EBARA ESA500W Instruction Manual

8.2 Routine Inspection

Check periodically that WARNING signal is not output on the LCD controller or
remote output.
No.
Motor Current
１
2 N2 Gas Flow
3 Vibration / Noise
4 Cooling water flow
5 Pump casing Temp.
6 Color / level of lubricant oil
When the WARNING/ALARM display appears, take action in accordance with
Section 10. "Troubleshooting."
If the lubrication oil amount is lower than the lower limit line of the oil level gauge,
supply the lubrication oil. See the Section 8.4 "Lubrication oil" when adding the
oil.
WARNING
WARNING
Even when the cause of the WARNING/ALARM signal has been removed the
signal will be maintained until the "RESET" signal is entered. After you have
taken the remedial action, press the "RESET" button on the controller or enter
the RESET signal from the control signal connector to reset the WARNING.
PM10U
Table 8.1 Typical check items
Item
Switch off the power supply to the pump first and interrupt the
Earth Leakage Breaker (ELB) and lockout before you start on
maintenance.
The pump and exhaust piping will remain at a high
temperature during operation and for a short time after the
pump has stopped.
Be sure to avoid contact and keep inflammable substances out
of reach.
Do not remove the outer cover during operation.
Sensor
(recommended)
Current
Transformer
Flow sensor
Every 1 week
-----
Flow sensor
Thermo- Couple
----- Every 1 month
P.49
Interval
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CORPORATION