Routine Inspection - EBARA ESA300W Instruction Manual

8.2 Routine Inspection

Check periodically that WARNING signal is not output on the LCD controller or
remote output.
No. Item
１ Motor Current
2 N2 Gas Flow
3 Vibration / Noise
4 Lubrication oil Quantity
5 Cooling water flow
6 Pumping casing Temp
7 Color of lubrication oil
When the ALARM/WARNING display appears, take action in accordance with
Section 10. "Troubleshooting."
If the lubrication oil amount is lower than the lower limit line of the oil level gauge,
supply the lubrication oil. See the section 8.3 "Lubrication oil" when adding the oil.
Switch off the power supply to the pump first and interrupt the Earth Leakage
WARNING
Breaker (ELB) and lockout before you start on maintenance.
The pump and exhaust piping will remain at a high temperature during
WARNING
operation and for a short time after the pump has stopped.
Be sure to avoid contact and keep inflammable substances out of reach.
Do not remove the outer cover during operation.
Even when the cause of the ALARM/WARNING signal has been removed the
signal will be maintained until the RESET signal is entered. After you have taken
the remedial action, press the RESET button on the controller or enter the RESET
signal from the control signal connector to reset the WARNING.
Table 8.1 Typical check items
Sensor
-----
Flow sensor
-----
Oil Level Switch and level gauge
Flow sensor
Thermo-Couple
-----
(57)
Interval
(recommended)
1 time/week
1 time/month
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CORPORATION