Maintenance And Overhaul; Routine Inspection - EBARA A70W Instruction Manual

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6 Maintenance and Overhaul

6.1 Routine Inspection

Check periodically that there is no ALARM signal on the LCD controller or remote output.
Any ALARM indicates that the pump is operating in abnormal condition.
No.
１
Motor Current
2 N
2
3 Vibration / Noise
4 Lubrication oil Quantity
5 Cooling water flow
6 Pump casing Temp.
7 Color of lubrication oil
If any ALARM/TRIP occurs, take necessary measures according to Section 8.
Switch off the power supply to the pump; interrupt the ELB or CB
WARNING
and lockout power before you start maintenance.
The pump and exhaust piping will remain at a high temperature
WARNING
during operation and for a short time after the pump has stopped.
Avoid contact and keep flammable substances out of reach.
Do not remove the outer cover during operation.
Even after clearing the cause of the ALARM/TRIP signal, the
[NOTE]
display will persist until the RESET signal is entered. After you
have taken the remedial action, press the RESET button on the
controller or enter the RESET signal from the control signal
connector to reset the ALARM/TRIP status.
An ALARM signal will not stop the pump.
CAUTION
However, continuing pump operation in this condition may lead to a
TRIP signal or a serious breakdown. After completion of the next
wafer cycle, check the pump in accordance with the instructions of
Section 8.
In the REMOTE operating mode, when a TRIP signal has occurred,
CAUTION
interrupt the external start signal before beginning maintenance. If
the external ALTERNATE start signal is present, the pump will start
as soon as the TRIP is RESET.
Table 6.1 Typical Check Items
Item
Gas Flow
Sensor Interval(recommended)
CT
Flow sensor
-----
1 time/week
Level switch
Flow sensor
T/C
----- 1 time/month
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