Olympus USPM-RU-W Series Operation Manual page 90

Optical measuring instrument
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Refractive index
Sets the refractive index of the selected layer; this item
must be set irrespective of an analysis method.
First, select the type of dispersion setting value [TYPE].
The four types of ([Sellmeier], [Schott], [Fixed], and
[File]) can be selected as standard. The type can be
increased by creating a user dispersion setting file on a
DISPERSION editing window. The standard type is as
follows: [Sellmeier] is a Sellmeier dispersion formula,
[Schott] is a Schott dispersion formula, [FIXED] is a
fixed value, and [FILE] is used to load a file. For
standard types except [FIXED] and [FILE], values
cannot be changed on this window. Create a dispersion
setting file using dispersion editing when changing
values.
Specify the filename of the refractive index data in the
[File] field when you select [FILE].
Enter a refractive index using numeric values when you
select [FIXED]. When you enable [FIX], enter the
refractive index of the layer because the refractive index
of the selected layer is not treated for film thickness
analysis. When you disable [FIX], enter the refractive
index of the layer in the relevant range because the
refractive index of the selected layer is treated for
analysis. During analysis, analysis is made in the
entered range.
A refractive index is set using a dispersion setting file
when you select types other than [FIXED] and [FILE].
The items enabled in a [FIX C1-C6] field at that time are
not treated for analysis. The disable items are treated
for analysis.
PV8959-F4E005
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