Olympus USPM-RU-W Series Operation Manual page 112

Data range is less than
variables
Too dark. Set manually
Sensor IO error
PV8959-F4E005
The number of variables is too many to perform the
curve fit method (FIT) of film thickness analysis.
Increase the quantity for enabling [FIX].
Sampling adjustment cannot be used because the
sampling time is long. Set the time manually.
A sensor for shutter operation cannot be detected.
Please contact us for consultation.
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