Olympus USPM-RU-W Series Operation Manual page 105

7.9.2. Fourier transform method: FFT
Detection points
Analysis data
Analysis data and a detection point are displayed on this window when [FFT] (Fourier
transform method) is selected for [method] on a LAYER setting window. The analysis data is
the data obtained when the spectral measured value data to be analyzed for film thickness is
frequency-analyzed. In this case, the vertical axis is a power spectrum, and the horizontal axis
is optical film thickness. The detection point displays the peak of analysis data used for film
thickness analysis. It can be checked. Film thickness is not also properly analyzed if the
detection point is not properly displayed in the peak position.
7.9.3. Curve fit method: FIT
Theoretical data
Analysis data
Analysis data and theoretical data are displayed on this window when [FIT] (curve fit method)
is selected for [method] on a LAYER setting window. The analysis data is the result data of
the spectral measured values to be analyzed for film thickness. It is the same as the data
displayed on a [GRAPH] window. The theoretical data is the theoretical value data created as
the result of film thickness analysis. The comparison of the analysis data with the theoretical
data can be confirmed.
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